Tris(diethylamido)(tert-butylimido)niobium(V)
Tris(diethylamido)(tert-butylimido)niobium(V), CAS 210363-27-2, with the molecular formula C16H39N4Nb and a molecular weight of 380.41 g/mol, is a niobium compound primarily utilised as a precursor in advanced materials science. It is specifically applied in chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes for microelectronics and nanotechnology, facilitating the deposition of thin films.
- IUPAC
- (tert)-Butyliminotris(diethylamino)niobium,t-Butylimido tris(diethylamido)niobium(V),tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-niobium
- Synonyms
- (tert)-Butyliminotris(diethylamino)niobiumt-Butylimido tris(diethylamido)niobium(V)tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-niobium

Chemical Vapour Deposition (CVD)
This niobium complex serves as a precursor in CVD processes for depositing thin films in microelectronic device fabrication. Its controlled decomposition allows for precise film growth.
Atomic Layer Deposition (ALD)
Tris(diethylamido)(tert-butylimido)niobium(V) is employed in ALD for highly conformal and uniform thin film deposition, crucial for semiconductor and advanced material applications.
Materials Science Research
It is utilized in research settings for the development of novel materials and thin film structures. Its unique chemical properties enable exploration of niobium-containing materials.
Microelectronics Fabrication
The compound is integral to micro/nanoelectronics manufacturing, where precise deposition of specialised layers is required for device performance and miniaturisation.
| Molecular weight | 380.41 |
|---|---|
| Empirical formula | C16H39N4Nb |
| Density | 1.015 g/mL at 25 °C |


Hazard statements
- H225Highly flammable liquid and vapour
- H261In contact with water releases flammable gas
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P231Handle under inert gas
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
- P422
| Flash point | -3 °C / 26.6 °F |
|---|---|
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xi |
| Risk statements (R) | 11-14/15-36/37/38 |
| Safety statements (S) | 26-43 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tris(diethylamido)(tert-butylimido)niobium(V) used for?
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Tris(diethylamido)(tert-butylimido)niobium(V) is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) processes for fabricating thin films in microelectronics and materials science.
What is the CAS number and formula for Tris(diethylamido)(tert-butylimido)niobium(V)?
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The CAS number is 210363-27-2 and the molecular formula is C16H39N4Nb.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tris(diethylamido)(tert-butylimido)niobium(V) typically as a research or technical grade material. We do not represent this product as USP, BP, or EP grade unless explicitly stated.
How should Tris(diethylamido)(tert-butylimido)niobium(V) be handled safely?
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This compound is highly flammable (Flash Point -3 °C) and reacts violently with water. Handle it in a well-ventilated area, away from ignition sources, and avoid contact with water. Refer to the Safety Data Sheet for comprehensive handling instructions.
Is Tris(diethylamido)(tert-butylimido)niobium(V) available for export?
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Yes, Tech Serve Solutions is a global supplier and exporter of fine chemicals, including Tris(diethylamido)(tert-butylimido)niobium(V), packaged for deposition systems.
How can I request a quote or sample?
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To request a quote or sample of Tris(diethylamido)(tert-butylimido)niobium(V), please contact our sales team via the website or provide your requirements through the product inquiry form.
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