Triphenylsulfonium triflate
Triphenylsulfonium triflate (CAS: 66003-78-9), with the chemical formula CF3SO3S(C6H5)3 and a molecular weight of 412.45 g/mol, is a key photoacid generator. It finds extensive use as a cationic photoinitiator, particularly in the fields of micro/nanoelectronics and polymer science. Its ability to generate strong acids upon exposure to UV light makes it invaluable for applications requiring precise photopatterning and controlled polymerisation.
- IUPAC
- TPST,Triphenylsulfonium trifluoromethanesulfonate

Cationic Photoinitiation
Triphenylsulfonium triflate serves as an efficient photoacid generator (PAG) for cationic photopolymerization. Upon UV irradiation, it decomposes to release triflic acid, initiating the polymerization of monomers like epoxides and vinyl ethers.
Micro/Nanoelectronics Fabrication
This compound is widely employed in photolithography processes for micro- and nanoelectronics. The generated photoacid acts as a catalyst in photoresist formulations, enabling the creation of high-resolution patterns essential for semiconductor manufacturing.
Materials Science and Polymer Science
In materials science, it is utilised for developing novel polymeric materials and for applications such as self-assembly and contact printing. Its role in controlled polymerisation allows for tailored material properties.
| Molecular weight | 412.45 |
|---|---|
| Linear formula | CF3SO3S(C6H5)3 |
| Application | Cationic photoinitiator. Photoacid generator. |
| Melting point | 133-137 °C(lit.) |

Hazard statements
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
| Protective equipment | dust mask type N95 (US), Eyeshields, Gloves |
|---|---|
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xi |
| Risk statements (R) | 36/37/38 |
| Safety statements (S) | 26 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Absorption | λmax 233 nm |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Triphenylsulfonium triflate used for?
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Triphenylsulfonium triflate (CAS: 66003-78-9) is primarily used as a cationic photoinitiator and a photoacid generator (PAG) in photolithography, micro/nanoelectronics fabrication, and polymer science for initiating cationic polymerisation and enabling precise patterning.
What is the CAS number and chemical formula for Triphenylsulfonium triflate?
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The CAS number for Triphenylsulfonium triflate is 66003-78-9 and its chemical formula is CF3SO3S(C6H5)3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Triphenylsulfonium triflate with a purity typically >98%. This is generally considered a technical or research grade and is not represented as USP, BP, EP, or pharmaceutical grade.
What are the safety considerations when handling Triphenylsulfonium triflate?
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Triphenylsulfonium triflate is classified as a Warning substance (GHS07) and may cause skin irritation (H315), serious eye irritation (H319), and respiratory irritation (H335). Appropriate personal protective equipment, including a dust mask (N95), eyeshields, and gloves, should be used. Handle in a well-ventilated area.
How is Triphenylsulfonium triflate packed and shipped?
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Triphenylsulfonium triflate is carefully packed according to international shipping regulations to ensure safe transit. We export globally, complying with all necessary transport and customs requirements.
How can I request a sample or quote for Triphenylsulfonium triflate?
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To request a sample or a quote for Triphenylsulfonium triflate, please contact our sales department via email or phone, providing your specific requirements and shipping details.
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