Tetramethylgermanium
Tetramethylgermanium (CAS: 865-52-1), with the linear formula (CH3)4Ge and a molecular weight of 132.78 g/mol, is a highly flammable organogermanium liquid. It serves as a key precursor in chemical vapour deposition (CVD) for the formation of germanium oxide thin films. Its applications are primarily within materials science and micro/nanoelectronics, enabling the development of advanced semiconductor materials and devices.

CVD Precursor for Germanium Oxide Films
Tetramethylgermanium is utilised as a source material in Chemical Vapour Deposition (CVD) processes. It facilitates the deposition of high-quality germanium oxide thin films, essential for various electronic and optical applications.
Materials Science Research
This organogermanium compound is employed in materials science research for the synthesis and characterisation of novel germanium-based materials. Its predictable reactivity makes it valuable for controlled material development.
Micro/Nanoelectronics Fabrication
In the field of micro- and nanoelectronics, Tetramethylgermanium acts as a precursor for depositing functional layers. These layers can be critical components in advanced semiconductor devices and integrated circuits.
| Molecular weight | 132.78 |
|---|---|
| Linear formula | (CH3)4Ge |
| Assay | 98% |
| Form | liquid |
| Boiling point | 43-44 °C/740 mmHg(lit.) |
| Density | 0.978 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.389(lit.) |
| Melting point | −88 °C (dec.)(lit.) |
| Vapour pressure | 6.74 psi (20 °C) |
| Application | CVD precursor to germanium oxide thin films.1 |


Hazard statements
- H225Highly flammable liquid and vapour
- H302Harmful if swallowed
- H312Harmful in contact with skin
- H319Causes serious eye irritation
- H332Harmful if inhaled
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | -37 °C / -34.6 °F |
| Transport (UN / ADR) | UN 1993BF 3 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xn |
| Risk statements (R) | 11-20/21/22-36 |
| Safety statements (S) | 16-26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetramethylgermanium (CAS: 865-52-1) used for?
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Tetramethylgermanium is primarily used as a Chemical Vapour Deposition (CVD) precursor for depositing germanium oxide thin films, finding applications in materials science and micro/nanoelectronics.
What is the CAS number and formula for Tetramethylgermanium?
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The CAS number for Tetramethylgermanium is 865-52-1, and its linear formula is (CH3)4Ge.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tetramethylgermanium with an assay of 98%. We do not represent this product as USP, BP, or EP grade.
How should Tetramethylgermanium be handled safely?
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Tetramethylgermanium is highly flammable (flash point -37 °C) and poses health hazards including being harmful if swallowed, in contact with skin, or inhaled, and causes serious eye irritation. Handle with extreme caution, using appropriate personal protective equipment such as eyeshields, gloves, and a suitable respirator in a well-ventilated area. Refer to the Safety Data Sheet for detailed handling procedures.
How is Tetramethylgermanium packed, shipped, and exported?
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Tetramethylgermanium is packed and shipped in compliance with international regulations for hazardous materials. As a global supplier, Tech Serve Solutions exports this chemical worldwide, adhering to all necessary transport and customs requirements.
How can I request a quote or sample for Tetramethylgermanium?
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To request a quote or a sample of Tetramethylgermanium, please contact our sales team through the website or call us directly. Our team will be pleased to assist you with your requirements.
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