Tantalum(V) methoxide
Tantalum(V) methoxide (CAS: 865-35-0), with the formula Ta(OCH3)5 and a molecular weight of 336.12 g/mol, is a tantalum compound often employed as a precursor in materials science and chemical synthesis. Its applications span areas requiring deposition of tantalum-containing films or materials, particularly in microelectronics and catalysis, due to its volatility and reactivity.

Precursor for Thin Film Deposition
Tantalum(V) methoxide serves as a volatile precursor for chemical vapour deposition (CVD) and atomic layer deposition (ALD) of tantalum oxide and tantalum nitride thin films. These films are critical in microelectronic devices for gate dielectrics and diffusion barriers.
Catalysis
In inorganic chemistry, it can be utilised as a catalyst or a component in catalytic systems. Its coordination chemistry allows for potential applications in various organic transformations.
Materials Science
This compound is used in the development of novel tantalum-based materials. It can be incorporated into matrices or used to form nanoparticles with specific electronic or optical properties.
Chemical Synthesis
As a reactive alkoxide, Tantalum(V) methoxide can participate in sol-gel processes or act as a reagent in the synthesis of other organometallic tantalum compounds.
| Molecular weight | 336.12 |
|---|---|
| Linear formula | Ta(OCH3)5 |
| Form | solid |
| Impurities tested | ≤2% Cl |


Hazard statements
- H228Flammable solid
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
| Protective equipment | dust mask type N95 (US), Eyeshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges |
|---|---|
| Transport (UN / ADR) | UN 1325 4.1 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xi |
| Risk statements (R) | 11-36/37/38 |
| Safety statements (S) | 16-26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tantalum(V) methoxide used for?
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Tantalum(V) methoxide is used as a precursor in thin film deposition for microelectronics, in catalysis, materials science, and chemical synthesis.
What is the CAS number and formula for Tantalum(V) methoxide?
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The CAS number is 865-35-0 and the formula is Ta(OCH3)5.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tantalum(V) methoxide with a purity of 98% (less than 2% Cl impurities). This is a technical/research grade, and we do not represent it as USP, BP, or EP grade.
What are the main hazards associated with Tantalum(V) methoxide?
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Tantalum(V) methoxide is a flammable solid (H228) and causes skin irritation (H315), serious eye irritation (H319), and may cause respiratory irritation (H335). Handle with appropriate personal protective equipment, including a dust mask, eyeshields, and gloves, in a well-ventilated area. Avoid ignition sources.
How is Tantalum(V) methoxide shipped and exported?
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Tantalum(V) methoxide is shipped and exported according to UN 1325, Class 4.1, Packing Group II regulations for flammable solids.
How can I request a sample or quote for Tantalum(V) methoxide?
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To request a sample or quote, please use the contact form on our website or email us directly with your inquiry, specifying the product name and CAS number.
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