Tantalum(V) ethoxide
Tantalum(V) ethoxide (CAS: 6074-84-6, Formula: Ta(OC2H5)5) is a pale yellow liquid with a molecular weight of 406.25 g/mol. Supplied by TSS at 99.98% trace metals basis, this organometallic compound serves as a precursor in materials science and microelectronics for depositing tantalum-containing thin films. It is also utilised in chemical synthesis and as a catalyst in various organic reactions.

Thin Film Deposition Precursor
Tantalum(V) ethoxide is a valuable precursor for the chemical vapour deposition (CVD) and atomic layer deposition (ALD) of tantalum oxide and tantalum nitride thin films, crucial for microelectronic applications like high-k dielectrics and diffusion barriers.
Catalysis
This compound acts as a catalyst in organic synthesis. Its Lewis acidic nature allows it to promote various reactions, including esterifications and transesterifications, contributing to efficient chemical transformations.
Materials Science Research
It serves as a starting material for synthesising novel tantalum-containing materials and nanoparticles, enabling research into advanced ceramics and functional materials with unique properties.
Chemical Synthesis Intermediate
Tantalum(V) ethoxide can be employed as an intermediate in the synthesis of other organometallic tantalum compounds or complex inorganic structures.
| Molecular weight | 406.25 |
|---|---|
| Linear formula | Ta(OC2H5)5 |
| Assay | 99.98% trace metals basis |
| Form | liquid |
| Boiling point | 155 °C/0.01 mmHg(lit.) |
| Density | 1.566 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.487(lit.) |
| Melting point | 21 °C(lit.) |
| Impurities tested | <2 wt. % toluene |


Hazard statements
- H226Flammable liquid and vapour
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 29 °C / 84.2 °F |
| Transport (UN / ADR) | UN 2920 3(8) / PGII |
| Water hazard class (WGK, DE) | 1 |
| Hazard codes (EU) | C |
| Risk statements (R) | 10-34 |
| Safety statements (S) | 16-26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tantalum(V) ethoxide used for?
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Tantalum(V) ethoxide is primarily used as a precursor for depositing thin films in microelectronics, as a catalyst in chemical synthesis, and in materials science research for developing new tantalum-based materials.
What are the CAS number and formula for Tantalum(V) ethoxide?
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The CAS number for Tantalum(V) ethoxide is 6074-84-6, and its chemical formula is Ta(OC2H5)5.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tantalum(V) ethoxide with an assay of 99.98% on a trace metals basis. TSS does not represent this product as USP, BP, or EP grade.
How is Tantalum(V) ethoxide handled and shipped?
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Tantalum(V) ethoxide is classified as flammable liquid and corrosive (H226, H314). It requires careful handling using appropriate personal protective equipment. Shipping adheres to UN 2920 3(8) / PGII regulations.
How can I request a quote or sample for Tantalum(V) ethoxide?
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To request a quote or a sample of Tantalum(V) ethoxide, please contact our sales team through the TSS website or by phone.
What are the primary hazards associated with Tantalum(V) ethoxide?
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The primary hazards are flammability (flash point 29 °C) and severe skin burns and eye damage (H314). It requires strict adherence to safety protocols during handling and storage.
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