Phosphine-d3
Phosphine-d3 (CAS: 13537-03-6, PD3) is a deuterated analogue of phosphine, a colourless, pyrophoric, and highly toxic gas. With a molecular weight of 37.02 g/mol and isotopic purity of 98 atom % D, it is primarily employed in specialized chemical synthesis and as a precursor in materials science, particularly for applications in microelectronics and vapor deposition processes.

Chemical Synthesis
Phosphine-d3 serves as a deuterated building block in organic and inorganic synthesis, allowing for isotopic labelling studies and the synthesis of complex deuterated molecules.
Materials Science
It acts as a precursor in the development of advanced materials, including semiconductors and thin films, by facilitating controlled deposition processes.
Microelectronics Manufacturing
Utilised in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) for fabricating microelectronic components, leveraging its specific decomposition characteristics.
Isotopic Labelling
Its deuterated nature makes it invaluable for spectroscopic and mechanistic studies where isotopic tracers are required to elucidate reaction pathways or material properties.
| Molecular weight | 37.02 |
|---|---|
| Linear formula | PD3 |
| Grade | electronic grade |
| Form | gas |
| Boiling point | −87.5 °C(lit.) |




Hazard statements
- H220Extremely flammable gas
- H280Contains gas under pressure; may explode if heated
- H314Causes severe skin burns and eye damage
- H330Fatal if inhaled
- H410Very toxic to aquatic life with long-lasting effects
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P260Do not breathe dust, fume, gas, mist, vapours or spray
- P273Avoid release to the environment
- P280Wear protective gloves, clothing and eye/face protection
- P284Wear respiratory protection
- P305IF IN EYES
| Transport (UN / ADR) | UN 2199 2.1(2.3) |
|---|---|
| Water hazard class (WGK, DE) | 2 |
| Hazard codes (EU) | F+,T+,N |
| Risk statements (R) | 12-17-26-34-50 |
| Safety statements (S) | 28-36/37-45-61-63 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Isotopic Purity | 98 atom % D |
|---|---|
| Mass Shift | M+3 |
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Phosphine-d3 used for?
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Phosphine-d3 is used in specialized chemical synthesis, as a precursor in materials science for applications in microelectronics and vapor deposition, and for isotopic labelling studies.
What is the CAS number and formula for Phosphine-d3?
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The CAS number for Phosphine-d3 is 13537-03-6, and its formula is PD3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Phosphine-d3 in electronic grade with an isotopic purity of 98 atom % D. TSS does not represent this product as USP, BP, or EP grade.
How should Phosphine-d3 be handled safely?
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Phosphine-d3 is an extremely flammable gas, causes severe skin burns and eye damage, and is fatal if inhaled. It also poses a significant threat to aquatic life with long-lasting effects. Strict adherence to safety protocols, including appropriate personal protective equipment and handling in well-ventilated areas or fume hoods, is essential. Refer to the Safety Data Sheet (SDS) for comprehensive handling information.
How is Phosphine-d3 packed, shipped, and exported?
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Phosphine-d3 is supplied as a gas, typically under pressure in specialized cylinders, adhering to all relevant transportation regulations for hazardous materials. TSS provides expert global export services.
How can I request a quote or sample for Phosphine-d3?
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Please contact the Tech Serve Solutions sales team via our website or direct contact details to request a quote or sample for Phosphine-d3.
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