Pentamethyldisilane
Pentamethyldisilane (CAS 812-15-7) is an organosilicon compound with the linear formula (CH3)3SiSi(CH3)2H and a molecular weight of 132.35 g/mol. This disilane derivative is a flammable liquid employed in specialized chemical synthesis and materials science. It serves as a precursor in microelectronics fabrication and in the development of advanced materials requiring silicon incorporation.

Chemical Synthesis
Pentamethyldisilane is utilised as a building block in organosilicon chemistry, enabling the synthesis of more complex silicon-containing molecules. Its reactivity allows for the introduction of specific silyl groups in organic frameworks.
Materials Science
This compound functions as a precursor in materials science for the deposition of silicon-containing thin films. These films can possess unique electronic or optical properties suitable for advanced applications.
Microelectronics Fabrication
In the microelectronics industry, Pentamethyldisilane can be used in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes. It is valuable for depositing silicon-based layers crucial for semiconductor manufacturing.
| Molecular weight | 132.35 |
|---|---|
| Linear formula | (CH3)3SiSi(CH3)2H |
| Assay | 97% |
| Boiling point | 98-99 °C(lit.) |
| Density | 0.722 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.4240(lit.) |

Hazard statements
- H225Highly flammable liquid and vapour
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | -10 °C / 14 °F |
| Transport (UN / ADR) | UN 1993BE 3 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F |
| Risk statements (R) | 11 |
| Safety statements (S) | 7/9-16-33 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Pentamethyldisilane used for?
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Pentamethyldisilane is used in specialized chemical synthesis, materials science, and microelectronics fabrication as a precursor for depositing silicon-containing films.
What are the CAS number and chemical formula for Pentamethyldisilane?
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The CAS number for Pentamethyldisilane is 812-15-7, and its linear formula is (CH3)3SiSi(CH3)2H.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Pentamethyldisilane with an assay of 97%. We do not represent this product as USP, BP, or EP grade.
How should Pentamethyldisilane be handled safely?
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Pentamethyldisilane is a flammable liquid (H225) requiring careful handling. Use in a well-ventilated area, away from ignition sources. Appropriate personal protective equipment, including eyeshields and gloves, is essential. Refer to the Safety Data Sheet for comprehensive guidance.
How is Pentamethyldisilane packed, shipped, and exported?
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Pentamethyldisilane is packed and shipped according to international regulations for hazardous materials, including UN 1993. Tech Serve Solutions is experienced in exporting fine chemicals globally.
How can I request a sample or quote for Pentamethyldisilane?
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To request a sample or a quote for Pentamethyldisilane, please contact our sales department through the website or by phone.
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