Glycidyl 1,1,2,2-tetrafluoroethyl ether
Glycidyl 1,1,2,2-tetrafluoroethyl ether (CAS: 85567-21-1, C5H6F4O2) is a versatile chemical compound with a molecular weight of 174.09 g/mol. It belongs to the class of epoxide monomers and is particularly noted for its application in advanced materials science. This fluorinated ether serves as a key building block in the synthesis of specialised polymers, finding use in cutting-edge microelectronics and lithography applications.
- IUPAC
- 2H-Perfluoroethyl glycidyl ether
- Synonyms
- 2-tetrafluoroethyl ether2H-Perfluoroethyl glycidyl ether

Advanced Lithography Resists
This compound is a fluorine-containing monomer specifically developed for 157 nm UV lithography resist polymers. Its unique properties contribute to the creation of high-resolution patterns essential in microelectronics fabrication.
Polymer Science
As an epoxide monomer, it is utilised in the synthesis of novel polymers. Its incorporation can impart desirable properties such as chemical resistance and thermal stability to the final polymer structure.
Materials Science Research
It serves as a valuable reagent in materials science for the development of new materials. Applications include research into self-assembly processes and contact printing technologies.
Micro/Nanoelectronics
The compound is employed in the micro and nanoelectronics sectors, likely as a precursor or component in the manufacturing of electronic devices and components requiring specialised fluorinated materials.
| Molecular weight | 174.09 |
|---|---|
| Empirical formula | C5H6F4O2 |
| Assay | 98% |
| Boiling point | 142-144 °C(lit.) |
| Density | 1.38 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.349(lit.) |


Hazard statements
- H226Flammable liquid and vapour
- H302Harmful if swallowed
- H312Harmful in contact with skin
- H315Causes skin irritation
- H319Causes serious eye irritation
- H332Harmful if inhaled
- H335May cause respiratory irritation
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 52 °C / 125.6 °F |
| Transport (UN / ADR) | UN 3271 3 / PGIII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xn |
| Risk statements (R) | 10-20/21/22-36/37/38 |
| Safety statements (S) | 16-26-33-36/37/39 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Glycidyl 1,1,2,2-tetrafluoroethyl ether used for?
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Glycidyl 1,1,2,2-tetrafluoroethyl ether is used as a fluorine-containing monomer for 157 nm UV lithography resist polymers, in polymer science, materials science research, and in the micro/nanoelectronics sector.
What are the CAS number and formula for Glycidyl 1,1,2,2-tetrafluoroethyl ether?
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The CAS number is 85567-21-1 and the empirical formula (Hill Notation) is C5H6F4O2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Glycidyl 1,1,2,2-tetrafluoroethyl ether with an assay of 98%. We do not represent this product as USP, BP, EP, or any other pharmacopoeia grade.
What are the safety considerations when handling Glycidyl 1,1,2,2-tetrafluoroethyl ether?
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This compound is a warning substance with hazards including flammability (H226) and irritation (H315, H319, H335), along with being harmful if swallowed, in contact with skin, or inhaled (H302, H312, H332). Appropriate personal protective equipment, including eyeshields, gloves, and respiratory protection, must be used. Ensure adequate ventilation and avoid ignition sources.
How is Glycidyl 1,1,2,2-tetrafluoroethyl ether packed and exported?
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Glycidyl 1,1,2,2-tetrafluoroethyl ether is packed and exported according to UN 3271 3 / PGIII regulations. We are experienced global suppliers and exporters of fine chemicals.
How can I request a quote or sample?
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Please contact our sales team directly or use the online enquiry form to request a quote or a sample of Glycidyl 1,1,2,2-tetrafluoroethyl ether.
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