Germane
Germane (CAS: 7782-65-2, GeH4, MW: 76.67) is an inorganic compound and the simplest germane. This highly flammable, toxic gas is a critical precursor in the semiconductor industry for depositing germanium-containing films via chemical vapor deposition (CVD) and atomic layer deposition (ALD). It is also employed in chemical synthesis and materials science research.

Semiconductor Manufacturing
Germane is a key precursor for the deposition of germanium (Ge) and silicon-germanium (SiGe) alloys used in advanced microelectronic devices. It enables the formation of thin films with specific electronic properties through CVD and ALD processes.
Materials Science
In materials science, germane is utilised for the synthesis of novel germanium-based nanomaterials and compounds. Its controlled decomposition allows for the precise engineering of material structures at the nanoscale.
Chemical Synthesis
As a versatile reagent, germane can be used in various chemical synthesis pathways to introduce germanium into organic and inorganic molecules. It serves as a building block for more complex germanium-containing compounds.
| Molecular weight | 76.67 |
|---|---|
| Linear formula | GeH4 |
| Assay | ≥99.997% |
| Grade | electronic grade |
| Form | gas |
| Boiling point | −88.4 °C(lit.) |
| Vapour density | 1.53 (−142 °C, vs air) |
| Melting point | −165 °C(lit.) |
| Impurities tested | <50 ppm Hydrogen (H2) |


Hazard statements
- H220Extremely flammable gas
- H280Contains gas under pressure; may explode if heated
- H302Harmful if swallowed
- H330Fatal if inhaled
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P260Do not breathe dust, fume, gas, mist, vapours or spray
- P284Wear respiratory protection
- P310Immediately call a POISON CENTER or doctor
- P410Protect from sunlight
| Protective equipment | Eyeshields, Faceshields, Gloves, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 2192 2.1(2.3) |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F+,T+ |
| Risk statements (R) | 12-17-22-26 |
| Safety statements (S) | 16-24-26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Transition Temp | critical temperature 35 °C |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Germane (CAS 7782-65-2) used for?
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Germane is primarily used as a precursor in semiconductor manufacturing for depositing germanium and silicon-germanium films via CVD and ALD. It also finds applications in materials science and chemical synthesis.
What are the CAS number and chemical formula for Germane?
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The CAS number for Germane is 7782-65-2, and its chemical formula is GeH4.
What grade and purity does Tech Serve Solutions supply for Germane?
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Tech Serve Solutions supplies Germane in electronic grade with an assay of ≥99.997%. We do not represent this product as USP, BP, or EP grade.
How should Germane be handled safely?
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Germane is an extremely flammable gas and toxic if inhaled (H220, H330). It is also harmful if swallowed (H302) and contains gas under pressure (H280). Handling requires appropriate personal protective equipment, including eyeshields, faceshields, gloves, and specific respiratory protection, in well-ventilated areas away from ignition sources.
How is Germane packed and shipped by Tech Serve Solutions?
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Tech Serve Solutions expertly packs and exports Germane according to strict international regulations for hazardous gases. Please contact us for specific shipping and handling details for your region.
How can I request a quote or sample for Germane?
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To request a quote or sample of Germane, please contact our sales team directly through our website or by phone. We will be pleased to assist you.
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