Bis(trimethylsilyl)amidohafnium(IV) chloride
Bis(trimethylsilyl)amidohafnium(IV) chloride (CAS: 70969-29-8) is a hafnium-based chemical compound with the linear formula [[(CH3)3Si]2N]2HfCl2 and a molecular weight of 570.17. It serves as a precursor in advanced materials deposition techniques. This compound is primarily utilized in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes for microelectronics and materials science applications, enabling the formation of thin films.
![Bis(trimethylsilyl)amidohafnium(IV) chloride ([[(CH3)3Si]2N]2HfCl2) — chemical structure, CAS 70969-29-8; Materials Science, fine chemical supplied by Tech Serve Solutions](/_next/image?url=https%3A%2F%2Fpub-f4d920c906024441a773a96f7098e551.r2.dev%2Fimages%2Fproducts%2F70969-29-8.png&w=3840&q=75)
CVD and ALD Precursor
This hafnium compound is employed as a volatile precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) for thin film fabrication. It facilitates the deposition of hafnium-containing layers critical in semiconductor manufacturing.
Materials Science
Used in materials science research for the development of novel materials with specific electronic or structural properties. Its controlled decomposition allows for precise incorporation of hafnium into various matrices.
Micro/Nanoelectronics
Essential for advanced micro- and nanoelectronic device fabrication. It contributes to the creation of gate dielectrics and other functional layers in integrated circuits, leveraging hafnium's dielectric properties.
| Molecular weight | 570.17 |
|---|---|
| Linear formula | [[(CH3)3Si]2N]2HfCl2 |
| Assay | ≥95%≥99.99% trace metals basis |
| Storage temperature | 2-8°C |
| Melting point | 40-44 °C(lit.) |
Hazard statements
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges |
|---|---|
| Transport (UN / ADR) | UN 3261 8 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 34 |
| Safety statements (S) | 26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Bis(trimethylsilyl)amidohafnium(IV) chloride used for?
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Bis(trimethylsilyl)amidohafnium(IV) chloride is used as a precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) for microelectronics and materials science applications, enabling the formation of hafnium-containing thin films.
What is the CAS number and formula for Bis(trimethylsilyl)amidohafnium(IV) chloride?
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The CAS number is 70969-29-8 and the linear formula is [[(CH3)3Si]2N]2HfCl2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Bis(trimethylsilyl)amidohafnium(IV) chloride with an assay of ≥95% and ≥99.99% (trace metals basis). TSS does not represent this product as USP, BP, or EP grade.
What are the safety and handling considerations for this chemical?
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This compound is classified as corrosive and causes severe skin burns and eye damage (H314). It requires stringent handling procedures, including the use of safety goggles, face shields, and appropriate respiratory protection (N100 or P3 filters), as well as chemical-resistant gloves. Always refer to the Safety Data Sheet (SDS) for detailed instructions.
How is Bis(trimethylsilyl)amidohafnium(IV) chloride shipped and exported?
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This product is shipped and exported under UN 3261, Hazard Class 8, Packing Group II, indicating it is a corrosive solid, acidic, inorganic, n.o.s. Specialised packaging and documentation are managed according to international regulations for hazardous materials.
How can I request a quote or sample?
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To request a quote or a sample of Bis(trimethylsilyl)amidohafnium(IV) chloride, please contact the Tech Serve Solutions sales team via our website or direct inquiry channels.
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