1,1,1,3,3,3-Hexafluoroisopropyl methacrylate
1,1,1,3,3,3-Hexafluoroisopropyl methacrylate (CAS: 3063-94-3; Formula: C<sub>7</sub>H<sub>8</sub>F<sub>6</sub>O<sub>2</sub>) is a fluorinated acrylic monomer with a molecular weight of 236.11 g/mol. It is characterised by its high fluorine content, contributing to unique material properties. This monomer is primarily used in the synthesis of advanced polymers for demanding applications, including microelectronics and optical materials, where low refractive index and high performance are critical.
- IUPAC
- HFiPMA
- Synonyms
- 3,3,3-Hexafluoroisopropyl methacrylateHFiPMA

Advanced Polymer Synthesis
Utilised as a monomer in the creation of specialised polymers, offering enhanced thermal stability and chemical resistance due to its fluorinated structure.
Microelectronics Fabrication
Key component in photoresist formulations for advanced lithography, particularly for 157 nm UV applications, enabling high-resolution patterning in semiconductor manufacturing.
Optical and Photonic Materials
Incorporated into polymers designed for optical waveguides and other photonic devices, benefiting from its low refractive index properties.
Materials Science Research
Serves as a building block for novel fluorinated materials with potential applications in coatings, membranes, and advanced composites.
| Molecular weight | 236.11 |
|---|---|
| Linear formula | H2C=C(CH3)CO2CH(CF3)2 |
| Assay | 99% |
| Density | 1.302 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.331(lit.) |
| Vapour pressure | 0.71 psi (20 °C) |


Hazard statements
- H225Highly flammable liquid and vapour
- H302Harmful if swallowed
- H312Harmful in contact with skin
- H315Causes skin irritation
- H319Causes serious eye irritation
- H332Harmful if inhaled
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 14 °C / 57.2 °F |
| Transport (UN / ADR) | UN 3272 3 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xn |
| Risk statements (R) | 11-20/21/22-36/37/38 |
| Safety statements (S) | 16-26-33-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is 1,1,1,3,3,3-Hexafluoroisopropyl methacrylate used for?
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1,1,1,3,3,3-Hexafluoroisopropyl methacrylate is primarily used in the synthesis of specialised polymers for applications in microelectronics, optical materials, and advanced materials science research, particularly in photolithography resists.
What are the CAS number and formula for 1,1,1,3,3,3-Hexafluoroisopropyl methacrylate?
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The CAS number is 3063-94-3, and the linear formula is H₂C=C(CH₃)CO₂CH(CF₃)₂.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies 1,1,1,3,3,3-Hexafluoroisopropyl methacrylate with a minimum assay of 99%. We do not represent this product as USP, BP, or EP grade.
How should 1,1,1,3,3,3-Hexafluoroisopropyl methacrylate be handled safely?
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This compound is flammable and harmful if swallowed, in contact with skin, or if inhaled. It can cause skin and serious eye irritation, and may cause respiratory irritation. Handle in a well-ventilated area with appropriate personal protective equipment, including safety glasses, gloves, and a respirator. Keep away from heat and open flames.
Is this product suitable for export and international shipping?
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Yes, Tech Serve Solutions is a global supplier and exporter of fine chemicals and can arrange for the export and shipment of 1,1,1,3,3,3-Hexafluoroisopropyl methacrylate globally, adhering to all relevant shipping regulations.
How can I request a sample or quote for 1,1,1,3,3,3-Hexafluoroisopropyl methacrylate?
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To request a sample or a quote, please contact our sales department through the website or by phone, providing your specific requirements and shipping details.
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