Phosphine
CAS Number7803-51-2
FormulaPH3
Mol. Weight34.00 g/mol
Phosphine
What is Phosphine?
Phosphine is a chemical compound with CAS number 7803-51-2 and molecular formula PH3. It is used in various industrial and research applications.
Applications
Phosphine is used primarily in the manufacture of III-IV semiconductor materials by OMCVD and as a dopant in crystalline and amorphous silicon.
Specifications
Linear Formula
PH3
Molecular Weight
34.00 g/mol
Grade
electronic grade
Assay/Purity
≥99.9995%
Impurities
<1 ppm Argon (Ar)
<1 ppm Arsine (AsH3)
<1 ppm Carbon dioxide (CO2)
<1 ppm Carbon monoxide (CO)
<1 ppm Methane (CH4)
<1 ppm Nitrogen (N2)
<1 ppm Oxygen (O2)
<1 ppm Water (H2O)
Boiling Point
−87.5 °C(lit.)
Safety Information
GHS02
GHS05
GHS06
GHS09Signal Word
Danger
Hazard Statements
H220-H280-H314-H330-H400
Precautionary Statements
P210-P260-P273-P280-P284-P305 + P351 + P338
Required PPE
Faceshields, Gloves, Goggles, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US)
EC Number
232-260-8
WGK Germany
2