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Silicon tetrafluoride

Silicon tetrafluoride chemical structure
CAS Number7783-61-1
FormulaSiF4
Mol. Weight104.08 g/mol

What is Silicon tetrafluoride?

Silicon tetrafluoride is a chemical compound with CAS number 7783-61-1 and molecular formula SiF4. It is used in various industrial and research applications.

Applications

Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD).1,2 Such fluorinated thin films show visible photoluminescence (PL) at room temperature.3

Specifications

Linear Formula

SiF4

Molecular Weight

104.08 g/mol

Grade

electronic grade

Assay/Purity

≥99.99%

Impurities

<0.5 ppm Carbon monoxide (CO)
<1 ppm Argon + oxygen (Ar + O2)
<1 ppm Carbon dioxide (CO2)
<10 ppm Methane (CH4)
<3 ppm Nitrogen (N2)
<50 ppm Hydrogen fluoride (HF)

Boiling Point

−86 °C(lit.)

Density

3.57 g/mL at 25 °C(lit.)

Safety Information

GHS05GHS05
GHS06GHS06
Signal Word

Danger

Hazard Statements

H300 +H310 + H330-H314

Precautionary Statements

P260-P264-P280-P284-P301 + P310-P302 + P350

Required PPE

Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US)

Melting Point

−90 °C(lit.)

EC Number

232-015-5

WGK Germany

3

Frequently Asked Questions