Palladium(II) hexafluoroacetylacetonate
CAS Number64916-48-9
FormulaPd(C5HF6O2)2
Mol. Weight520.52 g/mol
Palladium(II) hexafluoroacetylacetonate
What is Palladium(II) hexafluoroacetylacetonate?
Palladium(II) hexafluoroacetylacetonate is a chemical compound with CAS number 64916-48-9 and molecular formula Pd(C5HF6O2)2. It is used in various industrial and research applications.
Applications
Used in a redox transmetalation reaction to enhance CVD alloying technology for copper. Also used in the simultaneous etching of copper and deposition of palladium for applications in ultra large-scale integrated devices.1
Specifications
Linear Formula
Pd(C5HF6O2)2
Molecular Weight
520.52 g/mol
Safety Information
GHS07Signal Word
Warning
Hazard Statements
H315-H319-H335
Precautionary Statements
P261-P305 + P351 + P338
Required PPE
dust mask type N95 (US), Eyeshields, Gloves
EC Number
265-271-1
WGK Germany
3