Tris(dimethylamido)aluminum(III)
CAS Number32093-39-3
FormulaAl(N(CH3)2)3
Mol. Weight159.21 g/mol
Tris(dimethylamido)aluminum(III)
What is Tris(dimethylamido)aluminum(III)?
Tris(dimethylamido)aluminum(III) is a chemical compound with CAS number 32093-39-3 and molecular formula Al(N(CH3)2)3. It is used in various industrial and research applications.
Applications
Precursor to aluminum nitride (AlN) thin films by organometallic chemical vapor deposition (OMCVD).1
Specifications
Linear Formula
Al(N(CH3)2)3
Molecular Weight
159.21 g/mol
Density
0.865 g/mL at 25 °C(lit.)
Safety Information
GHS02
GHS05Signal Word
Danger
Hazard Statements
H260-H314
Precautionary Statements
P223-P231 + P232-P280-P305 + P351 + P338-P370 + P378-P422
Required PPE
Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges
Melting Point
82-84 °C(lit.)
WGK Germany
3