Tetrakis(ethylmethylamido)titanium(IV)
CAS Number308103-54-0
Formula[(CH3C2H5)N]4Ti
Mol. Weight280.28 g/mol
Tetrakis(ethylmethylamido)titanium(IV)
What is Tetrakis(ethylmethylamido)titanium(IV)?
Tetrakis(ethylmethylamido)titanium(IV) is a chemical compound with CAS number 308103-54-0 and molecular formula [(CH3C2H5)N]4Ti. It is used in various industrial and research applications.
Applications
Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).1
Specifications
Linear Formula
[(CH3C2H5)N]4Ti
Molecular Weight
280.28 g/mol
Assay/Purity
≥99.99%
Boiling Point
80 °C/0.1 mmHg(lit.)
Density
0.923 g/mL at 25 °C(lit.)
Safety Information
GHS02
GHS05Signal Word
Danger
Hazard Statements
H225-H260-H314
Precautionary Statements
P210-P223-P231 + P232-P280-P370 + P378-P422
Required PPE
Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
WGK Germany
3