Disilane
CAS Number1590-87-0
FormulaSi2H6
Mol. Weight62.22 g/mol
Disilane
What is Disilane?
Disilane is a chemical compound with CAS number 1590-87-0 and molecular formula Si2H6. It is used in various industrial and research applications.
Applications
Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.1
Specifications
Linear Formula
Si2H6
Molecular Weight
62.22 g/mol
Grade
electronic grade
Impurities
≤50 ppm Higher silanes
<0.2 ppm Chlorosilanes
<1 ppm Argon (Ar) + Oxygen (O2)
<1 ppm Carbon dioxide (CO2)
<1 ppm Nitrogen (N2)
<1 ppm THC
<1 ppm Water
<5 ppm Siloxanes
Boiling Point
−14.5 °C(lit.)
Safety Information
GHS02
GHS04
GHS07
GHS08Signal Word
Danger
Hazard Statements
H220-H280-H312-H315-H319-H332-H334-H335
Precautionary Statements
P210-P261-P280-P305 + P351 + P338-P342 + P311-P410 + P403
Required PPE
Eyeshields, Faceshields, Gloves, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US)
Melting Point
−132.6 °C(lit.)
EC Number
216-466-5
WGK Germany
3