Trimethylgallium
Trimethylgallium (CAS: 1445-79-0, Formula: Ga(CH3)3) is a highly reactive organometallic compound with a molecular weight of 114.83 g/mol. This volatile liquid is a key precursor in semiconductor manufacturing, primarily used for the deposition of gallium-containing thin films via Metal-Organic Chemical Vapour Deposition (MOCVD) and Atomic Layer Deposition (ALD) processes. It is supplied by TSS for advanced materials science and microelectronic applications.
- IUPAC
- Me3Ga,TMG,TMGa
- Synonyms
- Trimethylgallium

MOCVD Precursor
Trimethylgallium is a critical precursor in Metal-Organic Chemical Vapour Deposition (MOCVD) for synthesising compound semiconductor thin films, such as gallium arsenide (GaAs) and indium gallium phosphide (InGaP).
ALD Precursor
In Atomic Layer Deposition (ALD), Trimethylgallium serves as a gallium source for depositing highly conformal thin films essential for advanced microelectronic devices and optoelectronics.
Materials Science
It is utilised in materials science research for the development of novel gallium-based compounds and nanostructures with tailored electronic and optical properties.
Semiconductor Manufacturing
Trimethylgallium is instrumental in the fabrication of integrated circuits, light-emitting diodes (LEDs), laser diodes, and photovoltaic cells requiring precise gallium incorporation.
| Molecular weight | 114.83 |
|---|---|
| Linear formula | Ga(CH3)3 |
| Form | liquid |
| Boiling point | 92.5 °C/760 mmHg(lit.) |
| Density | 1.132 g/mL at 25 °C |
| Melting point | -15.8 °C(lit.) |


Hazard statements
- H225Highly flammable liquid and vapour
- H250Catches fire spontaneously if exposed to air
- H261In contact with water releases flammable gas
- H314Causes severe skin burns and eye damage
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P222Do not allow contact with air
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P422
| Flash point | 21 °C / 69.8 °F |
|---|---|
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 14/15-17-34 |
| Safety statements (S) | 6-8-26-36/37/39-43-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Trimethylgallium (CAS: 1445-79-0) primarily used for?
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Trimethylgallium (CAS: 1445-79-0) is primarily used as a precursor in Metal-Organic Chemical Vapour Deposition (MOCVD) and Atomic Layer Deposition (ALD) for manufacturing semiconductor thin films.
What are the CAS number and chemical formula for Trimethylgallium?
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The CAS number for Trimethylgallium is 1445-79-0, and its chemical formula is Ga(CH3)3.
What grade and purity does Tech Serve Solutions supply for Trimethylgallium?
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Tech Serve Solutions supplies Trimethylgallium. The specific grade and purity are available upon request. Please note that TSS does not represent this product as USP, BP, or EP grade unless explicitly stated.
How is Trimethylgallium handled and stored?
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Trimethylgallium is highly flammable and pyrophoric, reacting violently with water and air. It causes severe skin burns and eye damage. Handling requires an inert atmosphere (e.g., nitrogen or argon), specialized equipment, and strict adherence to safety protocols, including the use of personal protective equipment. Store in a cool, well-ventilated area away from ignition sources and incompatible materials.
Can Trimethylgallium be exported by Tech Serve Solutions?
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Yes, Tech Serve Solutions is a global supplier and exporter of Trimethylgallium, adhering to all relevant international shipping regulations.
How can I request a quote or sample of Trimethylgallium?
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To request a quote or sample of Trimethylgallium, please contact our sales department directly through the TSS website or by phone.
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