Tellurium tetrachloride
Tech Serve Solutions offers Tellurium tetrachloride (CAS: 10026-07-0) with the molecular formula TeCl₄ and a molecular weight of 269.41 g/mol. This compound is a key precursor in materials science and micro/nanoelectronics. Its applications primarily involve chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes, contributing to the synthesis of advanced materials and semiconductor fabrication. It is supplied at an assay of 99%.

CVD and ALD Precursor
Tellurium tetrachloride serves as a critical precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes. It is utilized for depositing thin films containing tellurium in the manufacturing of electronic devices and advanced materials.
Materials Science
In materials science, TeCl₄ is employed in the synthesis and modification of various tellurium-containing compounds and alloys. These materials can exhibit unique optical, electrical, or thermoelectric properties.
Micro/Nanoelectronics
This compound finds application in the microelectronics industry for specific deposition steps. It contributes to the fabrication of semiconductor components and nanostructured devices where precise elemental incorporation is required.
| Molecular weight | 269.41 |
|---|---|
| Linear formula | TeCl4 |
| Assay | 99% |
| Boiling point | 380 °C(lit.) |
| Density | 3.26 g/mL at 25 °C(lit.) |
| Melting point | 224 °C(lit.) |

Hazard statements
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges |
|---|---|
| Transport (UN / ADR) | UN 3260 8 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 34 |
| Safety statements (S) | 26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tellurium tetrachloride used for?
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Tellurium tetrachloride (CAS: 10026-07-0) is primarily used as a precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes within materials science and micro/nanoelectronics for fabricating tellurium-containing thin films and materials.
What are the CAS number and formula for Tellurium tetrachloride?
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The CAS number for Tellurium tetrachloride is 10026-07-0, and its chemical formula is TeCl₄.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tellurium tetrachloride with an assay of 99%. We do not represent this product as USP, BP, EP, or any other pharmacopoeia grade.
How should Tellurium tetrachloride be handled safely?
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Tellurium tetrachloride is corrosive and causes severe skin burns and eye damage (H314). Handling requires appropriate personal protective equipment, including eyeshields, face shields, suitable gloves, and respiratory protection. Always consult the Safety Data Sheet (SDS) before use.
How is Tellurium tetrachloride packed, shipped, and exported?
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Tellurium tetrachloride is classified as UN 3260, Class 8, Packing Group II for transport. We ensure compliant packing, shipping, and export procedures according to international regulations.
How can I request a quote or sample?
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To request a quote or sample of Tellurium tetrachloride, please contact our sales team through the website or by phone, providing your contact details and the quantity required.
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