N,N′,N′′-Tri-tert-butylsilanetriamine
N,N′,N′′-Tri-tert-butylsilanetriamine (CAS 205503-61-3) is a silicon-based compound with the linear formula HSi(HNC(CH₃)₃)₃ and a molecular weight of 245.48 g/mol. It is recognised for its utility as a precursor in materials science, particularly in microelectronics and thin-film deposition processes. This chemical serves as a valuable building block for creating silicon-containing materials through chemical vapour deposition (CVD) and atomic layer deposition (ALD).
- Synonyms
- 205503-61-3, HSi(HNC(CH3)3)3
CVD and ALD Precursor
N,N′,N′′-Tri-tert-butylsilanetriamine functions as a highly effective precursor for Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) processes. It is employed in the fabrication of silicon-containing thin films and materials for microelectronic devices and advanced coatings.
Materials Science
This compound is instrumental in materials science research and development, offering a route to novel silicon-based materials. Its specific chemical structure allows for controlled incorporation of silicon into various material matrices.
Micro/Nanoelectronics
The unique properties of N,N′,N′′-Tri-tert-butylsilanetriamine make it suitable for applications within the micro and nanoelectronics industries. It can be used in the synthesis of specialized dielectric or semiconductor layers.
Vapor Deposition
As a vapor deposition precursor, this silanetriamine derivative facilitates the deposition of silicon-containing layers with high purity and controlled stoichiometry, essential for advanced electronic component manufacturing.
| Molecular weight | 245.48 |
|---|---|
| Linear formula | HSi(HNC(CH3)3)3 |
| Assay | 99.99% trace metals basis |
| Boiling point | 76-80 °C/0.3 mmHg(lit.) |
| Density | 0.827 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.4289(lit.) |
Hazard statements
- H226Flammable liquid and vapour
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 53 °C / 127.4 °F |
| Transport (UN / ADR) | UN 2920 3(8) / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 10-34 |
| Safety statements (S) | 16-26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is N,N′,N′′-Tri-tert-butylsilanetriamine used for?
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N,N′,N′′-Tri-tert-butylsilanetriamine is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for producing silicon-containing materials, particularly in microelectronics and materials science.
What is the CAS number and formula for N,N′,N′′-Tri-tert-butylsilanetriamine?
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The CAS number is 205503-61-3, and its linear formula is HSi(HNC(CH₃)₃)₃.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies N,N′,N′′-Tri-tert-butylsilanetriamine with an assay of 99.99% trace metals basis. We do not represent this product as meeting USP, BP, or EP pharmacopoeia standards.
What are the main safety hazards associated with this chemical?
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N,N′,N′′-Tri-tert-butylsilanetriamine is classified as a Danger. It is flammable (H226) and causes severe skin burns and eye damage (H314). Appropriate personal protective equipment, including face shields, gloves, and respiratory protection, is mandatory when handling this substance.
How is N,N′,N′′-Tri-tert-butylsilanetriamine packed, shipped, and exported?
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This chemical is packed in accordance with UN 2920 3(8)/PGII regulations for hazardous materials. Tech Serve Solutions can facilitate global export, adhering to all necessary shipping and regulatory requirements.
How can I request a quote or sample of N,N′,N′′-Tri-tert-butylsilanetriamine?
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To request a quote or a sample of N,N′,N′′-Tri-tert-butylsilanetriamine, please contact our sales department through the TSS website or via direct inquiry.
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