4,4,5,5,6,7,7,7-Octafluoro-2-hydroxy-6-(trifluoromethyl)heptyl methacrylate
4,4,5,5,6,7,7,7-Octafluoro-2-hydroxy-6-(trifluoromethyl)heptyl methacrylate (CAS: 16083-79-7) is a fluorinated acrylic monomer with the linear formula H₂C=C(CH₃)CO₂CH₂CH(OH)CH₂CF₂CF₂CF(CF₃)₂. This compound has a molecular weight of 412.20 and is primarily utilized in the synthesis of specialized polymers. Its unique fluorinated structure lends valuable properties to materials, making it suitable for advanced applications in microelectronics and materials science.
- Synonyms
- 5,6,7,7,7-Octafluoro-2-hydroxy-6-(trifluoromethyl)heptyl methacrylate

Fluorinated Polymers for Lithography
This monomer is a key component in the development of advanced resist polymers for 157 nm UV lithography. Its incorporation enables the creation of materials with specific optical and etching properties essential for microelectronic fabrication.
Materials Science and Micro/Nanoelectronics
Used in creating novel materials with tailored surface properties, such as low surface energy or chemical resistance, due to its high fluorine content. It finds application in advanced coatings and functional surfaces for micro/nanoelectronic devices.
Polymer Synthesis
Serves as a building block in polymer science for synthesizing fluorinated polymers with unique characteristics. These polymers can be designed for specific applications requiring thermal stability, chemical inertness, or specialized dielectric properties.
| Molecular weight | 412.20 |
|---|---|
| Linear formula | H2C=C(CH3)CO2CH2CH(OH)CH2CF2CF2CF(CF3)2 |
| Assay | 97% |
| Boiling point | 83-86 °C/0.85 mmHg(lit.) |
| Density | 1.48 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.374(lit.) |
| Contains / stabiliser | 100 ppm 4-tert-butylcatechol as inhibitor |

Hazard statements
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
| Protective equipment | Eyeshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 113 °C / 235.4 °F |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xi |
| Risk statements (R) | 36/37/38 |
| Safety statements (S) | 26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is 4,4,5,5,6,7,7,7-Octafluoro-2-hydroxy-6-(trifluoromethyl)heptyl methacrylate used for?
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It is used in the synthesis of specialized polymers, particularly for advanced lithography resists in microelectronics, and in materials science for creating materials with unique surface properties due to its fluorinated structure.
What is the CAS number and formula for this compound?
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The CAS number is 16083-79-7, and its linear formula is H₂C=C(CH₃)CO₂CH₂CH(OH)CH₂CF₂CF₂CF(CF₃)₂.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies this chemical at an assay of 97%. TSS does not represent this product as USP, BP, or EP grade.
What are the key safety considerations when handling this chemical?
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This compound is classified as a Warning. It causes skin irritation (H315), serious eye irritation (H319), and may cause respiratory irritation (H335). Appropriate personal protective equipment, including eyeshields, gloves, and suitable respiratory protection, is essential. Handle in a well-ventilated area.
How is this product packed, shipped, and exported?
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Tech Serve Solutions, a global supplier and exporter, provides this chemical with standard packaging suitable for laboratory reagents and fine chemicals. We adhere to all international shipping and export regulations for chemical substances.
How can I request a sample or obtain a quote for this product?
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To request a sample or obtain a quotation, please contact our sales team through the website or by phone. We will be pleased to assist with your specific requirements.
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