Tungsten(VI) fluoride
Tungsten(VI) fluoride (CAS: 7783-82-6), WF6, is a volatile and highly reactive inorganic compound with a molecular weight of 297.83 g/mol. Known for its strong oxidizing properties, it is a critical reagent in advanced materials science and microelectronics fabrication. Its applications primarily revolve around chemical vapour deposition (CVD) processes for creating tungsten-based thin films and as a potent fluorinating agent in specialised chemical synthesis.
- IUPAC
- Hexafluorotungsten,Tungsten hexafluoride
- Synonyms
- HexafluorotungstenTungsten hexafluoride
Chemical Vapour Deposition (CVD)
Tungsten(VI) fluoride is extensively used in the semiconductor industry for the deposition of tungsten thin films. These films are vital for creating low-resistance interconnects and diffusion barriers in integrated circuits.
Materials Science Research
This compound serves as a precursor in materials science for synthesising novel tungsten-containing materials. Its reactivity allows for the development of advanced compounds with unique electronic or structural properties.
Fluorinating Agent
In specialised chemical synthesis, WF6 acts as a powerful fluorinating agent. It is employed for introducing fluorine atoms into organic or inorganic molecules where other fluorinating agents may be unsuitable.
Specialty Gas Applications
Due to its gaseous nature at room temperature and high reactivity, Tungsten(VI) fluoride finds use as a specialty gas in various industrial and research applications requiring a controlled source of tungsten and fluorine.
| Molecular weight | 297.83 |
|---|---|
| Linear formula | WF6 |
| Assay | ≥99.9% |
| Boiling point | 17.5 °C(lit.) |
| Melting point | 2.3 °C(lit.) |
Hazard statements
- H280Contains gas under pressure; may explode if heated
- H301Toxic if swallowed
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P301IF SWALLOWED
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
- P410Protect from sunlight
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 2196 8(2.3) |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | T |
| Risk statements (R) | 23/24/25-34 |
| Safety statements (S) | 26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tungsten(VI) fluoride used for?
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Tungsten(VI) fluoride is primarily used in chemical vapour deposition (CVD) for creating tungsten thin films in semiconductor manufacturing, as a precursor in materials science, and as a potent fluorinating agent in specialised chemical synthesis.
What are the CAS number and formula for Tungsten(VI) fluoride?
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The CAS number for Tungsten(VI) fluoride is 7783-82-6, and its chemical formula is WF6.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tungsten(VI) fluoride with an assay of ≥99.9%. We do not represent this product as USP, BP, or EP grade.
How is Tungsten(VI) fluoride handled and what are the safety concerns?
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Tungsten(VI) fluoride is a highly corrosive and toxic gas. It is labelled with Danger signal word, carrying hazard statements H280 (contains gas under pressure; may explode if heated), H301 (Toxic if swallowed), H311 (Toxic in contact with skin), and H314 (Causes severe skin burns and eye damage). Strict handling procedures with appropriate personal protective equipment, including full-face respirators, chemical-resistant gloves, and eye protection, are essential.
How is Tungsten(VI) fluoride shipped and exported by TSS?
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Tungsten(VI) fluoride is classified under UN 2196, hazard class 8 (corrosive) with a subsidiary hazard of 2.3 (toxic gas). TSS exports this material in compliance with all relevant international transportation regulations for hazardous substances.
How can I request a quote or sample for Tungsten(VI) fluoride?
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To request a quote or sample for Tungsten(VI) fluoride, please contact our sales department through the website or by phone, providing your specific requirements and shipping details.
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