Tris(trimethylsilyl)germanium hydride
Tris(trimethylsilyl)germanium hydride (CAS: 104164-54-7, Formula: [(CH3)3Si]3GeH) is an organogermanium compound with a molecular weight of 293.22 g/mol. This material is recognised for its utility as a precursor in chemical synthesis and materials science. Its properties make it suitable for applications in areas such as vapor deposition and catalysis, contributing to the development of advanced materials and electronic components.
![Tris(trimethylsilyl)germanium hydride ([(CH3)3Si]3GeH) — chemical structure, CAS 104164-54-7; Chemistry, fine chemical supplied by Tech Serve Solutions](/_next/image?url=https%3A%2F%2Fpub-f4d920c906024441a773a96f7098e551.r2.dev%2Fimages%2Fproducts%2F104164-54-7.png&w=3840&q=75)
Vapor Deposition Precursor
This compound serves as a precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. It can be utilised for depositing germanium-containing thin films, which are critical in microelectronics and semiconductor fabrication.
Chemical Synthesis
As an organogermanium reagent, it is employed in synthetic organic and inorganic chemistry. It can act as a source of germanium or as a reducing agent in various chemical transformations.
Materials Science
The compound's structure and germanium content make it a valuable material for research and development in materials science. It may be used in the creation of novel germanium-based alloys or compounds with specific electronic or optical properties.
Catalysis
Organometallic compounds like Tris(trimethylsilyl)germanium hydride can sometimes function as catalysts or catalyst precursors in specific chemical reactions. Further research may explore its catalytic activity in organic transformations.
| Molecular weight | 293.22 |
|---|---|
| Linear formula | [(CH3)3Si]3GeH |
| Assay | 97% |
| Density | 0.937 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.4974(lit.) |

Hazard statements
- H302Harmful if swallowed
- H312Harmful in contact with skin
- H332Harmful if inhaled
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
| Protective equipment | dust mask type N95 (US), Eyeshields, Gloves |
|---|---|
| Flash point | 113 °C / 235.4 °F |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xn |
| Risk statements (R) | 20/21/22 |
| Safety statements (S) | 36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tris(trimethylsilyl)germanium hydride used for?
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Tris(trimethylsilyl)germanium hydride is primarily used as a precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD) for creating germanium-containing thin films. It also finds application in chemical synthesis and materials science research.
What are the CAS number and formula for Tris(trimethylsilyl)germanium hydride?
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The CAS number is 104164-54-7 and the formula is [(CH3)3Si]3GeH.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tris(trimethylsilyl)germanium hydride with a minimum assay of 97%. This product is supplied for research and development purposes and TSS does not represent it as USP, BP, or EP grade.
What are the primary safety concerns when handling Tris(trimethylsilyl)germanium hydride?
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Warning: Harmful if swallowed (H302), harmful in contact with skin (H312), and harmful if inhaled (H332). Appropriate personal protective equipment, including a dust mask type N95 (US), eyeshields, and gloves, should be used.
How is Tris(trimethylsilyl)germanium hydride packed, shipped, and exported?
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Tech Serve Solutions professionally packs and prepares chemicals for safe shipment and export worldwide, adhering to all relevant regulations.
How can I request a sample or quote for Tris(trimethylsilyl)germanium hydride?
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To request a sample or a quote, please contact our sales department through the website or by phone, providing the product name and CAS number (104164-54-7).
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