Trimethoxymethylsilane
Trimethoxymethylsilane (CAS: 1185-55-3), with the chemical formula CH3Si(OCH3)3 and a molecular weight of 136.22 g/mol, is a key organosilicon compound. This liquid reagent is primarily utilised as a precursor in materials science and micro/nanoelectronics manufacturing. Its properties make it valuable for deposition processes and in general chemical synthesis applications requiring a reactive silane source.
- IUPAC
- Methyltrimethoxysilane

Chemical Synthesis
Trimethoxymethylsilane serves as a versatile building block in organic and organometallic synthesis. It can be employed to introduce the trimethoxysilyl group into various molecules, facilitating further functionalization or material preparation.
Materials Science
In materials science, this compound is used as a precursor for the sol-gel process, enabling the formation of silicon-based oxide networks. It is instrumental in creating specialised coatings, resins, and composite materials with tailored properties.
Micro/Nanoelectronics
As a deposition precursor, Trimethoxymethylsilane is applied in microelectronic fabrication for creating thin dielectric films or surface modification layers. Its controlled decomposition allows for precise deposition in semiconductor manufacturing.
| Molecular weight | 136.22 |
|---|---|
| Linear formula | CH3Si(OCH3)3 |
| Assay | ≥98.0% (GC) |
| Grade | deposition grade |
| Form | liquid |
| Boiling point | 102-104 °C(lit.) |
| Density | 0.955 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.371(lit.)n20/D 1.371 |


Hazard statements
- H225Highly flammable liquid and vapour
- H317May cause an allergic skin reaction
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 16 °C / 60.8 °F |
| Transport (UN / ADR) | UN 1993BF 3 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xi |
| Risk statements (R) | 11-43 |
| Safety statements (S) | 16-24 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Trimethoxymethylsilane used for?
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Trimethoxymethylsilane is used in chemical synthesis, materials science for sol-gel processes, and in micro/nanoelectronics as a deposition precursor for thin films.
What are the CAS number and chemical formula for Trimethoxymethylsilane?
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The CAS number is 1185-55-3 and the chemical formula is CH3Si(OCH3)3.
What grade and purity does Tech Serve Solutions supply for Trimethoxymethylsilane?
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Tech Serve Solutions supplies Trimethoxymethylsilane in a deposition grade with an assay of ≥98.0% (GC). We do not represent this product as USP, BP, or EP grade.
How should Trimethoxymethylsilane be handled safely?
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Trimethoxymethylsilane is a flammable liquid and may cause an allergic skin reaction. Handle with appropriate personal protective equipment including eyeshields, gloves, and use in a well-ventilated area away from ignition sources, as indicated by Danger signal word and H225/H317 hazard statements.
How is Trimethoxymethylsilane packaged and exported?
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Trimethoxymethylsilane is supplied as a liquid and is packaged and exported in compliance with relevant transportation regulations, identified as UN 1993, BF 3 / PGII.
How can I request a sample or quote for Trimethoxymethylsilane?
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To request a sample or obtain a quote for Trimethoxymethylsilane, please contact our sales team through the TSS website.
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