Triethylgallium
Triethylgallium (CAS: 1115-99-7), with the linear formula (CH3CH2)3Ga and a molecular weight of 156.91 g/mol, is a volatile liquid organometallic compound. It is primarily utilised as a precursor in Metal-Organic Chemical Vapour Deposition (MOCVD) and Atomic Layer Deposition (ALD) processes. Its applications are crucial in the microelectronics industry for the fabrication of semiconductor devices.
- IUPAC
- Et3Ga,TEG,TEGa
- Synonyms
- Et3GaTEGTEGa

MOCVD and ALD Precursor
Triethylgallium serves as a key precursor in MOCVD and ALD techniques for depositing thin films of gallium-containing materials. It is essential for the synthesis of III-V semiconductor compounds.
Semiconductor Manufacturing
This organogallium compound is widely employed in the microelectronics sector for the production of advanced semiconductor devices. Its controlled decomposition allows for precise layer growth.
Materials Science Research
In materials science, Triethylgallium is used for exploring new gallium-based materials and their unique electronic or optical properties. It facilitates the development of novel nanostructures.
| Molecular weight | 156.91 |
|---|---|
| Linear formula | (CH3CH2)3Ga |
| Form | liquid |
| Boiling point | 109 °C/300 mmHg(lit.) |
| Density | 1.067 g/mL at 25 °C |
| Melting point | -82 °C(lit.) |


Hazard statements
- H225Highly flammable liquid and vapour
- H250Catches fire spontaneously if exposed to air
- H261In contact with water releases flammable gas
- H314Causes severe skin burns and eye damage
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P222Do not allow contact with air
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P422
| Flash point | 21 °C / 69.8 °F |
|---|---|
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 14/15-17-34 |
| Safety statements (S) | 8-16-26-36/37-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Triethylgallium used for?
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Triethylgallium (CAS: 1115-99-7) is predominantly used as a precursor in Metal-Organic Chemical Vapour Deposition (MOCVD) and Atomic Layer Deposition (ALD) for manufacturing semiconductor devices and thin films.
What is the CAS number and formula for Triethylgallium?
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The CAS number for Triethylgallium is 1115-99-7, and its linear formula is (CH3CH2)3Ga.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Triethylgallium typically as a research or technical grade material. We do not represent it as USP, BP, or EP grade unless explicitly stated.
How is Triethylgallium classified for safety and handling?
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Triethylgallium is classified as a Danger hazard. It is highly flammable (H225), pyrophoric (H250), and reacts violently with water (H261), causing severe skin burns and eye damage (H314). Strict handling procedures, including inert atmosphere conditions, are mandatory.
How is Triethylgallium packed, shipped, and exported?
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Triethylgallium is carefully packed in specialised containers designed for pyrophoric and water-reactive substances. Tech Serve Solutions can arrange for its export globally, adhering to all relevant transportation regulations for hazardous chemicals.
How can I request a sample or quote for Triethylgallium?
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To request a sample or obtain a quotation for Triethylgallium, please contact our sales team through the website or by phone, providing your specific requirements.
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