Tetrakis(ethylmethylamido)titanium(IV)
Tetrakis(ethylmethylamido)titanium(IV) (CAS: 308103-54-0), with the linear formula [(CH3C2H5)N]4Ti and a molecular weight of 280.28 g/mol, is a high-purity organometallic precursor. It is primarily utilised as a source material for depositing titanium nitride (TiN) thin films via organometallic chemical vapour deposition (OMCVD). This compound plays a crucial role in advanced materials science and microelectronics manufacturing processes.
- IUPAC
- Tetrakis(ethylmethylamino)titanium(IV)
![Tetrakis(ethylmethylamido)titanium(IV) ([(CH3C2H5)N]4Ti) — chemical structure, CAS 308103-54-0; Materials Science, fine chemical supplied by Tech Serve Solutions](/_next/image?url=https%3A%2F%2Fpub-f4d920c906024441a773a96f7098e551.r2.dev%2Fimages%2Fproducts%2F308103-54-0.png&w=3840&q=75)
Titanium Nitride Thin Film Deposition
Utilised as a precursor in organometallic chemical vapour deposition (OMCVD) to create high-quality titanium nitride (TiN) thin films. These films are essential for applications requiring barrier layers, diffusion barriers, and conductive coatings in microelectronic devices.
Materials Science Research
Serves as a chemical building block for research and development in advanced materials. Its specific properties enable the exploration and synthesis of novel titanium-containing compounds and thin film structures for various technological applications.
Micro/Nanoelectronics Manufacturing
A key precursor for depositing thin films used in the fabrication of integrated circuits and other microelectronic components. TiN films derived from this precursor offer excellent electrical conductivity and chemical stability.
| Molecular weight | 280.28 |
|---|---|
| Linear formula | [(CH3C2H5)N]4Ti |
| Assay | ≥99.99% |
| Boiling point | 80 °C/0.1 mmHg(lit.) |
| Density | 0.923 g/mL at 25 °C(lit.) |
| Storage temperature | 2-8°C |
| Application | Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).1 |
Hazard statements
- H225Highly flammable liquid and vapour
- H260In contact with water releases flammable gases
- H314Causes severe skin burns and eye damage
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P223Do not allow contact with water
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P370In case of fire
- P422
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 2 °C / 35.6 °F |
| Transport (UN / ADR) | UN 3398 4.3/PG 1 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 11-14-34 |
| Safety statements (S) | 16-26-36/37/39-43-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetrakis(ethylmethylamido)titanium(IV) used for?
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Tetrakis(ethylmethylamido)titanium(IV) is primarily used as a precursor for the deposition of titanium nitride (TiN) thin films through organometallic chemical vapour deposition (OMCVD) in materials science and microelectronics applications.
What is the CAS number and formula for Tetrakis(ethylmethylamido)titanium(IV)?
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The CAS number for Tetrakis(ethylmethylamido)titanium(IV) is 308103-54-0, and its linear formula is [(CH3C2H5)N]4Ti.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tetrakis(ethylmethylamido)titanium(IV) with an assay of ≥99.99% purity. We do not represent this product as USP, BP, EP, or pharmacopoeia grade.
How should Tetrakis(ethylmethylamido)titanium(IV) be handled?
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This compound is highly flammable and reacts violently with water, posing significant hazards. Handle with extreme caution in a well-ventilated area, wearing appropriate personal protective equipment including face shields, gloves, goggles, and suitable respirators. Ensure strict exclusion of moisture.
How is Tetrakis(ethylmethylamido)titanium(IV) packed and shipped?
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Tetrakis(ethylmethylamido)titanium(IV) is packed and shipped in compliance with regulations for hazardous materials, including UN 3398, classifying it as Class 4.3, Packing Group I. It is typically stored under refrigeration at 2-8°C.
How can I request a quote or sample?
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To request a quote or a sample of Tetrakis(ethylmethylamido)titanium(IV), please contact the Tech Serve Solutions sales team through our website or by phone, providing your contact details and the quantity required.
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