Tetrakis(dimethylamido)titanium(IV)
Tetrakis(dimethylamido)titanium(IV), CAS 3275-24-9, with the formula [(CH3)2N]4Ti and a molecular weight of 224.17 g/mol, is a key chemical precursor. This liquid compound, assaying at 99.999%, is primarily utilized in advanced material science and microelectronics. Its specific application includes serving as a precursor for titanium dioxide deposition via atomic layer deposition (ALD) when used with water, contributing to the fabrication of thin films in electronic devices.
- IUPAC
- TDMAT,Tetrakis(dimethylamino)titanium(IV)
- Synonyms
- TDMAT
![Tetrakis(dimethylamido)titanium(IV) ([(CH3)2N]4Ti) — chemical structure, CAS 3275-24-9; Materials Science, fine chemical supplied by Tech Serve Solutions](/_next/image?url=https%3A%2F%2Fpub-f4d920c906024441a773a96f7098e551.r2.dev%2Fimages%2Fproducts%2F3275-24-9.png&w=3840&q=75)
Atomic Layer Deposition (ALD) Precursor
Tetrakis(dimethylamido)titanium(IV) serves as a high-purity precursor for depositing titanium dioxide (TiO2) thin films via ALD. This process, often using water as a co-reactant, is crucial in semiconductor manufacturing and advanced optical coatings due to the precise film thickness control achievable.
Chemical Vapor Deposition (CVD) Applications
Beyond ALD, this titanium compound can be employed in Chemical Vapor Deposition processes for the controlled deposition of titanium-containing thin films. Its volatility and reactivity allow for efficient material transfer and film formation in vacuum-based deposition systems.
Materials Science Research
In materials science, Tetrakis(dimethylamido)titanium(IV) is a valuable reagent for researchers exploring novel titanium-based materials and coatings. Its well-defined composition and high purity support reproducible experimental outcomes in developing advanced functional materials.
| Molecular weight | 224.17 |
|---|---|
| Linear formula | [(CH3)2N]4Ti |
| Assay | 99.999% |
| Form | liquid |
| Boiling point | 50 °C/0.5 mmHg(lit.) |
| Density | 0.947 g/mL at 25 °C(lit.) |
| Application | Precursor for the deposition of titanium dioxide by atmoic layer deposition with water.1 |
Hazard statements
- H225Highly flammable liquid and vapour
- H260In contact with water releases flammable gases
- H314Causes severe skin burns and eye damage
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P223Do not allow contact with water
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P370In case of fire
- P422
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | -30 °C / -22 °F |
| Transport (UN / ADR) | UN 3398 4.3/PG 1 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 11-14-34 |
| Safety statements (S) | 16-26-36/37/39-43-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetrakis(dimethylamido)titanium(IV) used for?
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Tetrakis(dimethylamido)titanium(IV) is primarily used as a precursor for depositing titanium dioxide (TiO2) thin films through atomic layer deposition (ALD), particularly when using water as a co-reactant. It also finds applications in chemical vapor deposition (CVD) and materials science research.
What is the CAS number and chemical formula for Tetrakis(dimethylamido)titanium(IV)?
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The CAS number for Tetrakis(dimethylamido)titanium(IV) is 3275-24-9, and its chemical formula is [(CH3)2N]4Ti.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tetrakis(dimethylamido)titanium(IV) at an assay of 99.999%. TSS does not represent this product as USP, BP, or EP grade.
What are the primary hazards associated with Tetrakis(dimethylamido)titanium(IV)?
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Tetrakis(dimethylamido)titanium(IV) is a highly flammable liquid and vapour (H225) and reacts violently with water (H314, Supplemental Hazard: Reacts violently with water). It causes severe skin burns and eye damage (H314). Due to these hazards, it requires careful handling in inert conditions, away from ignition sources and water. Appropriate personal protective equipment, including face shields, gloves, and suitable respiratory protection, is essential.
How is Tetrakis(dimethylamido)titanium(IV) packaged, shipped, and exported?
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Tetrakis(dimethylamido)titanium(IV) is packaged and shipped according to its hazardous classification (UN 3398, UN hazard class 4.3). Tech Serve Solutions, as an experienced global supplier and exporter, ensures compliance with all relevant shipping and customs regulations for international delivery.
How can I request a quote or sample for Tetrakis(dimethylamido)titanium(IV)?
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To request a quote or sample for Tetrakis(dimethylamido)titanium(IV), please visit the Tech Serve Solutions website and use the product inquiry form, or contact our sales team directly with your specific requirements.
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