Tetrakis(dimethylamido)hafnium(IV)
Tetrakis(dimethylamido)hafnium(IV) (CAS: 19782-68-4), with the molecular formula [(CH3)2N]4Hf and a molecular weight of 354.79 g/mol, is a high-purity organometallic compound. It serves as a critical precursor in advanced materials science, particularly for thin-film deposition processes like Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD). Its applications are primarily within the microelectronics and nanotechnology sectors.
- IUPAC
- TDMAH,Tetrakis(dimethylamino)hafnium(IV)
![Tetrakis(dimethylamido)hafnium(IV) ([(CH3)2N]4Hf) — chemical structure, CAS 19782-68-4; Materials Science, fine chemical supplied by Tech Serve Solutions](/_next/image?url=https%3A%2F%2Fpub-f4d920c906024441a773a96f7098e551.r2.dev%2Fimages%2Fproducts%2F19782-68-4.png&w=3840&q=75)
CVD and ALD Precursor
Tetrakis(dimethylamido)hafnium(IV) is extensively used as a precursor for depositing hafnium-based thin films via Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD). These films are crucial in semiconductor manufacturing for gate dielectrics and other advanced electronic components.
Materials Science
In materials science, this compound facilitates the synthesis of novel hafnium-containing materials. Its controlled decomposition allows for precise material composition and structure in research and development settings.
Micro/Nanoelectronics Fabrication
It is employed in the micro and nanoelectronics industries for creating high-performance devices. The deposition of hafnium oxide (HfO2) layers, for instance, requires high-purity precursors like TDMAH for optimal dielectric properties.
| Molecular weight | 354.79 |
|---|---|
| Linear formula | [(CH3)2N]4Hf |
| Assay | ≥99.99% |
| Density | 1.098 g/mL at 25 °C |
| Melting point | 26-29 °C(lit.) |
Hazard statements
- H228Flammable solid
- H261In contact with water releases flammable gas
- H314Causes severe skin burns and eye damage
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
- P422
| Protective equipment | Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges |
|---|---|
| Transport (UN / ADR) | UN 3396 4.1(4.3) / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 11-14-34 |
| Safety statements (S) | 6-26-36/37/39-43-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetrakis(dimethylamido)hafnium(IV) used for?
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Tetrakis(dimethylamido)hafnium(IV) is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for creating thin films in the microelectronics and advanced materials sectors.
What is the CAS number and chemical formula for Tetrakis(dimethylamido)hafnium(IV)?
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The CAS number is 19782-68-4 and the chemical formula is [(CH3)2N]4Hf.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tetrakis(dimethylamido)hafnium(IV) with an assay of ≥99.99%. TSS does not represent this product as USP, BP, EP, or any other pharmacopoeia grade.
What are the key safety considerations when handling Tetrakis(dimethylamido)hafnium(IV)?
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Tetrakis(dimethylamido)hafnium(IV) is classified as flammable (H228) and reacts violently with water (H261, supplemental hazard statement). It causes severe skin burns and eye damage (H314). Handling requires extreme caution, appropriate personal protective equipment, and avoidance of water contact. It is imperative to consult the Safety Data Sheet (SDS) before use.
How is Tetrakis(dimethylamido)hafnium(IV) packed, shipped, and exported?
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As a flammable solid that reacts with water, Tetrakis(dimethylamido)hafnium(IV) (UN 3396) is shipped under strict international regulations for hazardous materials (ADR/RID Class 4.1, Subsidiary Hazard Class 4.3, Packing Group II). TSS ensures compliant packaging and documentation for global export.
How can I request a quote or sample of Tetrakis(dimethylamido)hafnium(IV)?
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To request a quote or a sample of Tetrakis(dimethylamido)hafnium(IV), please contact our sales team through the website or call us directly. Provide your details and the required quantity.
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