Tetrakis(diethylamido)zirconium(IV)
Tetrakis(diethylamido)zirconium(IV), CAS 13801-49-5, with the formula [(C2H5)2N]4Zr and a molecular weight of 379.74 g/mol, is a highly reactive organometallic compound. It is primarily employed as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes. Its properties make it suitable for thin film deposition in microelectronics and materials science applications.
![Tetrakis(diethylamido)zirconium(IV) ([(C2H5)2N]4Zr) — chemical structure, CAS 13801-49-5; Materials Science, fine chemical supplied by Tech Serve Solutions](/_next/image?url=https%3A%2F%2Fpub-f4d920c906024441a773a96f7098e551.r2.dev%2Fimages%2Fproducts%2F13801-49-5.png&w=3840&q=75)
CVD and ALD Precursor
Tetrakis(diethylamido)zirconium(IV) serves as a volatile precursor for depositing zirconium-containing thin films. It is utilised in chemical vapour deposition (CVD) and atomic layer deposition (ALD) techniques for creating high-quality films in microelectronic devices and advanced materials.
Materials Science
This compound finds application in materials science research for the synthesis of novel zirconium-based materials. Its specific chemical structure allows for controlled incorporation of zirconium into various material matrices.
Micro/Nanoelectronics Fabrication
In the micro and nanoelectronics industry, Tetrakis(diethylamido)zirconium(IV) is used in the fabrication of integrated circuits and other nanoscale devices. It facilitates the deposition of dielectric or conductive layers with precise control.
| Molecular weight | 379.74 |
|---|---|
| Linear formula | [(C2H5)2N]4Zr |
| Assay | ≥99.99% trace metals basis |
| Boiling point | 128 °C/0.05 mmHg(lit.) |
| Density | 1.026 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.51(lit.) |
| Storage temperature | 2-8°C |
Hazard statements
- H225Highly flammable liquid and vapour
- H261In contact with water releases flammable gas
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P231Handle under inert gas
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
- P422
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 12 °C / 53.6 °F |
| Transport (UN / ADR) | UN 3398 4.3/PG 2 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xi |
| Risk statements (R) | 11-14-36/37/38 |
| Safety statements (S) | 16-26-36 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetrakis(diethylamido)zirconium(IV) used for?
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Tetrakis(diethylamido)zirconium(IV) is primarily used as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) for creating zirconium-containing thin films, particularly in microelectronics and materials science.
What is the CAS number and formula for Tetrakis(diethylamido)zirconium(IV)?
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The CAS number is 13801-49-5 and the chemical formula is [(C2H5)2N]4Zr.
What grade and purity does Tech Serve Solutions supply for Tetrakis(diethylamido)zirconium(IV)?
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Tech Serve Solutions supplies Tetrakis(diethylamido)zirconium(IV) with an assay of ≥99.99% trace metals basis. We do not represent this product as USP, BP, or EP grade.
How should Tetrakis(diethylamido)zirconium(IV) be handled safely?
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Tetrakis(diethylamido)zirconium(IV) is highly flammable and reacts violently with water. It can cause skin, eye, and respiratory irritation. Handle in a well-ventilated area, away from ignition sources, and avoid contact with water. Always use appropriate personal protective equipment, including eye protection, gloves, and a suitable respirator.
How is Tetrakis(diethylamido)zirconium(IV) packed, shipped, and exported?
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Product is packed in appropriate containers suitable for hazardous and moisture-sensitive materials. Shipping and export comply with all relevant international regulations for flammable and water-reactive substances.
How can I request a sample or quote for Tetrakis(diethylamido)zirconium(IV)?
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To request a sample or a quote, please contact the Tech Serve Solutions sales team through our website or by phone, providing your specific requirements.
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