Sulfur hexafluoride
Sulfur hexafluoride (CAS: 2551-62-4, Formula: SF6) is a non-flammable, synthetic gas with exceptional dielectric properties. Its high density and chemical inertness make it ideal for various industrial and technical applications. With a molecular weight of 146.06 g/mol, this compound serves critical roles in electrical insulation, as a tracer gas in leak detection, and within the semiconductor industry for plasma etching processes.

Electrical Insulation
Sulfur hexafluoride is extensively used as an insulating gas in high-voltage electrical equipment such as switchgear, transformers, and accelerators due to its excellent dielectric strength and arc-quenching capabilities.
Semiconductor Manufacturing
In the semiconductor industry, SF6 is employed as an etching gas in plasma processes for manufacturing integrated circuits. It facilitates the precise removal of materials to create intricate patterns on silicon wafers.
Tracer Gas
Due to its inertness and detectability, sulfur hexafluoride serves as an effective tracer gas for leak detection in high-vacuum systems, industrial pipelines, and refrigeration units.
Medical Applications
While primarily industrial, SF6 has niche medical uses, notably as an ophthalmic tamponade agent to aid retinal reattachment surgery, offering a stable internal tamponade effect.
| Molecular weight | 146.06 |
|---|---|
| Linear formula | SF6 |
| Assay | ≥99.75% |
| Boiling point | −64 °C/1 mmHg(lit.) |
| Vapour pressure | 22 mmHg (21.1 °C) |
| Vapour density | 5.11 (vs air) |
| Melting point | −50 °C(lit.) |

Hazard statements
- H280Contains gas under pressure; may explode if heated
Precautionary statements
- P410Protect from sunlight
| Protective equipment | Eyeshields, Gloves, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 1080 2.2 |
| Water hazard class (WGK, DE) | nwg |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Sulfur Hexafluoride used for?
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Sulfur hexafluoride (SF6) is primarily used for its excellent dielectric properties as an insulator in high-voltage electrical equipment, in semiconductor manufacturing for plasma etching, and as a tracer gas for leak detection.
What are the CAS number and formula for Sulfur Hexafluoride?
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The CAS number for Sulfur Hexafluoride is 2551-62-4, and its chemical formula is SF6.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Sulfur Hexafluoride with a minimum assay of ≥99.75%. We do not represent this product as USP, BP, or EP grade unless explicitly stated in the product specifications.
How should Sulfur Hexafluoride be handled?
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Sulfur hexafluoride is supplied under pressure and requires careful handling. It carries a GHS04 symbol and a Warning signal word (H280: Contains gas under pressure; may explode if heated). Appropriate personal protective equipment, including eyeshields, gloves, and respiratory protection, should be used. Store in a well-ventilated area away from heat sources (P410 + P403).
Is Sulfur Hexafluoride a controlled substance?
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Based on the provided data, Sulfur Hexafluoride is not listed as a controlled substance. However, regulations regarding its use, particularly concerning environmental impact, should always be consulted.
How is Sulfur Hexafluoride packed and shipped?
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Sulfur hexafluoride is classified under UN 1080, with hazard class 2.2 (non-flammable gas). TSS exports this product in compliance with international shipping regulations for compressed gases.
How can I request a sample or quote for Sulfur Hexafluoride?
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To request a sample or a quote for Sulfur Hexafluoride, please contact our sales team via the website or by phone, providing your specific requirements and delivery details.
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