Palladium(II) hexafluoroacetylacetonate
Palladium(II) hexafluoroacetylacetonate (CAS: 64916-48-9; Formula: Pd(C5HF6O2)2) is a palladium complex with a molecular weight of 520.52 g/mol. It is primarily utilised in advanced chemical synthesis, particularly within catalysis and materials science. This compound plays a key role in enhancing Chemical Vapour Deposition (CVD) alloying technologies for copper and is instrumental in the simultaneous etching and deposition of palladium for microelectronics.

Enhancing CVD Alloying Technology
Palladium(II) hexafluoroacetylacetonate serves as a vital component in redox transmetalation reactions, significantly improving the efficiency and capabilities of Chemical Vapour Deposition (CVD) processes for copper alloying.
Microelectronic Fabrication
This palladium complex is employed in the simultaneous etching of copper and deposition of palladium. This dual functionality is critical for manufacturing ultra large-scale integrated devices, advancing micro/nanoelectronics.
Catalysis and Chemical Synthesis
As a homogeneous palladium catalyst precursor, it is valuable in various organic synthesis pathways, facilitating complex chemical transformations with high selectivity and efficiency.
| Molecular weight | 520.52 |
|---|---|
| Linear formula | Pd(C5HF6O2)2 |
| Application | Used in a redox transmetalation reaction to enhance CVD alloying technology for copper. Also used in the simultaneous etching of copper and deposition of palladium for applications in ultra large-scale integrated devices.1 |

Hazard statements
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
| Protective equipment | dust mask type N95 (US), Eyeshields, Gloves |
|---|---|
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xi |
| Risk statements (R) | 36/37/38 |
| Safety statements (S) | 26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Palladium(II) hexafluoroacetylacetonate used for?
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Palladium(II) hexafluoroacetylacetonate is used to enhance CVD alloying technology for copper via redox transmetalation and for the simultaneous etching of copper and deposition of palladium in microelectronics. It also serves as a homogeneous palladium catalyst in chemical synthesis.
What is the CAS number and chemical formula for Palladium(II) hexafluoroacetylacetonate?
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The CAS number is 64916-48-9, and the chemical formula is Pd(C5HF6O2)2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Palladium(II) hexafluoroacetylacetonate as a research or technical grade chemical. We do not represent it as USP, BP, EP, or for any pharmaceutical, nutraceutical, or food applications.
How should Palladium(II) hexafluoroacetylacetonate be handled safely?
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Handle with appropriate personal protective equipment including a dust mask (type N95 US), eyeshields, and gloves. Avoid breathing dust/fume/gas/mist/vapours/spray. In case of contact with eyes, rinse cautiously with water for several minutes and seek medical advice. It is classified as an irritant to the skin, eyes, and respiratory system.
How is Palladium(II) hexafluoroacetylacetonate packed and shipped?
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Products are carefully packed to ensure integrity during transit and are available for global export. Specific packaging details can be provided upon request.
How can I request a sample or quote for Palladium(II) hexafluoroacetylacetonate?
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To request a sample or a formal quotation, please use the contact form on our website or call our sales department. Please reference the product name and CAS number.
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