Hexachlorodisilane
Hexachlorodisilane (CAS: 13465-77-5), with the linear formula (SiCl3)2 and a molecular weight of 268.89 g/mol, is a key organosilicon compound. It is a colourless liquid characterised by its reactivity, particularly with water. Hexachlorodisilane is primarily employed in materials science and micro/nanoelectronics for the synthesis of specialised silicon-containing materials and as a precursor in surface modification techniques.
- IUPAC
- 1,1,1,2,2,2-Hexachlorodisilane,Disilicon hexachloride,HCDS
- Synonyms
- 1,1,1,2,2,2-HexachlorodisilaneDisilicon hexachlorideHCDS

Materials Science Precursor
Hexachlorodisilane serves as a valuable precursor in the synthesis of advanced silicon-based materials. Its unique structure allows for the incorporation of silicon into complex molecular architectures for various material applications.
Micro/Nanoelectronics Fabrication
In the microelectronics industry, this compound is utilised in fabrication processes requiring precise deposition or modification of silicon-containing layers. It plays a role in the development of semiconductor devices and nanostructures.
Surface Modification and Self-Assembly
Hexachlorodisilane is instrumental in surface functionalisation, particularly in self-assembly processes. It enables the creation of specific surface properties for applications like contact printing and the development of self-assembled monolayers.
Silane Coupling Agent Intermediate
As a highly reactive silane, it acts as an intermediate in the production of silane coupling agents and adhesion promoters, enhancing the compatibility between organic and inorganic materials.
| Molecular weight | 268.89 |
|---|---|
| Linear formula | (SiCl3)2 |
| Assay | 96% |
| Boiling point | 144-145.5 °C(lit.) |
| Density | 1.562 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.475(lit.) |

Hazard statements
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Transport (UN / ADR) | UN 2987 8 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 14-34 |
| Safety statements (S) | 26-36/37/39-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Hexachlorodisilane used for?
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Hexachlorodisilane is used as a precursor in materials science, for micro/nanoelectronics fabrication, surface modification, self-assembly processes, and as an intermediate for silane coupling agents.
What is the CAS number and formula for Hexachlorodisilane?
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The CAS number for Hexachlorodisilane is 13465-77-5, and its linear formula is (SiCl3)2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Hexachlorodisilane with an assay of 96%. We do not represent this product as USP, BP, or EP grade.
What are the main safety hazards associated with Hexachlorodisilane?
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Hexachlorodisilane is a Danger GHS hazard, labelled with H314, indicating it causes severe skin burns and eye damage. It reacts violently with water, necessitating careful handling with appropriate personal protective equipment, including gloves, goggles, and respiratory protection.
How is Hexachlorodisilane packed, shipped, and exported?
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Hexachlorodisilane is packed and shipped according to UN 2987 8 / PGII regulations. Tech Serve Solutions is an experienced global supplier and exporter of fine chemicals.
How can I request a sample or quote for Hexachlorodisilane?
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To request a sample or a quote for Hexachlorodisilane, please contact our sales team through the website or by phone.
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