Dimethyl selenide
Dimethyl selenide (CAS: 593-79-3), also known as methyl selenide, is an organoselenium compound with the formula (CH3)2Se. This volatile liquid has a molecular weight of 109.03 g/mol. It is utilised as a precursor in materials science for chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes, particularly in microelectronics and semiconductor fabrication. It is also employed as an analytical reagent.
- IUPAC
- Methyl selenide

CVD and ALD Precursor
Dimethyl selenide serves as a key precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) techniques. It is instrumental in the deposition of selenium-containing thin films for semiconductor and microelectronic applications.
Materials Science
In materials science, this compound is used for synthesising novel selenium-based materials. Its controlled decomposition allows for precise material composition and structure in advanced applications.
Analytical Reagent
Dimethyl selenide is utilised as an analytical reagent in specific chemical analyses. Its defined properties make it suitable for certain laboratory procedures and research applications.
| Molecular weight | 109.03 |
|---|---|
| Linear formula | (CH3)2Se |
| Assay | ≥99.0% (GC) |
| Density | 1.408 g/mL at 20 °C(lit.) |
| Storage temperature | 2-8°C |



Hazard statements
- H301Toxic if swallowed
- H331Toxic if inhaled
- H373May cause damage to organs through prolonged exposure
- H410Very toxic to aquatic life with long-lasting effects
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P273Avoid release to the environment
- P301IF SWALLOWED
- P311Call a POISON CENTER or doctor
- P501Dispose of contents and container per local regulations
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 3282 6.1 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | T,N |
| Risk statements (R) | 23/25-33-50/53 |
| Safety statements (S) | 20/21-28-45-60-61 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Dimethyl selenide used for?
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Dimethyl selenide is used as a precursor in CVD and ALD for thin film deposition in microelectronics, in materials science for synthesising selenium-based materials, and as an analytical reagent.
What are the CAS number and chemical formula for Dimethyl selenide?
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The CAS number for Dimethyl selenide is 593-79-3, and its linear chemical formula is (CH3)2Se.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Dimethyl selenide with an assay of ≥99.0% (GC). TSS does not represent this product as USP, BP, or EP grade.
How should Dimethyl selenide be handled safely?
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Dimethyl selenide is highly toxic and flammable. Handle with extreme care in a well-ventilated area or fume hood, using appropriate personal protective equipment including gloves, eyeshields, and a full-face respirator. It is classified under GHS06, GHS08, and GHS09 with signal word 'Danger' and hazard statements H301, H331, H373, H410.
How is Dimethyl selenide packed, shipped, and exported?
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Dimethyl selenide is shipped under UN 3282, Hazard Class 6.1, Packing Group II. As a specialist global supplier, Tech Serve Solutions adheres to all regulations for the safe packing, shipping, and export of this chemical.
How can I request a sample or quote for Dimethyl selenide?
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To request a sample or a quote for Dimethyl selenide, please contact our sales team directly through the website or by phone, providing your specific requirements and delivery details.
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