Diethylsilane
Diethylsilane (CAS: 542-91-6), with the linear formula (C2H5)2SiH2 and a molecular weight of 88.22 g/mol, is a key organosilicon compound. This flammable liquid is primarily utilised as a reagent in chemical vapour deposition (CVD) processes for depositing silicon dioxide (SiO2) films, a critical step in the manufacturing of microelectronic devices. Its specific reactivity makes it valuable in advanced material synthesis.

Chemical Vapour Deposition (CVD)
Diethylsilane serves as a crucial precursor in the chemical vapour deposition of silicon dioxide (SiO2). This application is fundamental in the microelectronics industry for creating insulating layers and other essential structures on semiconductor wafers.
Organosilicon Synthesis
As an organosilicon compound, Diethylsilane can be employed as a building block or reagent in the synthesis of more complex organosilicon materials and polymers, leveraging its reactive Si-H bonds.
Research and Development
Its unique chemical properties make Diethylsilane a valuable reagent for research laboratories exploring new synthetic pathways and material science applications within chemical synthesis.
| Molecular weight | 88.22 |
|---|---|
| Linear formula | (C2H5)2SiH2 |
| Assay | 99% |
| Boiling point | 56 °C(lit.) |
| Density | 0.681 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.391(lit.) |
| Application | Reagent employed in the chemical vapor deposition of SiO2 for microelectronics.1 |

Hazard statements
- H225Highly flammable liquid and vapour
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
| Flash point | -20 °C / -4 °F |
|---|---|
| Transport (UN / ADR) | UN 1993BF 3 / PGII |
| Water hazard class (WGK, DE) | 1 |
| Hazard codes (EU) | F |
| Risk statements (R) | 11 |
| Safety statements (S) | 16 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Diethylsilane used for?
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Diethylsilane is primarily used as a reagent in chemical vapour deposition (CVD) for the deposition of SiO2 in microelectronics. It also finds applications in organosilicon synthesis and general chemical research.
What are the CAS number and formula for Diethylsilane?
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The CAS number for Diethylsilane is 542-91-6, and its linear formula is (C2H5)2SiH2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Diethylsilane with an assay of 99%. This product is not classified as USP, BP, or EP grade.
How should Diethylsilane be handled safely?
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Diethylsilane is a highly flammable liquid and vapour (H225). It should be kept away from heat, hot surfaces, sparks, open flames, and other ignition sources. Use only non-sparking tools and take precautionary measures against static discharge. Handle in a well-ventilated area.
Is Diethylsilane a controlled substance?
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The provided data does not indicate that Diethylsilane is a controlled substance.
How is Diethylsilane shipped or exported?
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Diethylsilane is classified under UN 1993 BF 3 / PG II for transport, indicating it is a flammable liquid, and shipped accordingly by Tech Serve Solutions as a global supplier and exporter.
How can I request a sample or quote for Diethylsilane?
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To request a sample or a quote for Diethylsilane, please contact our sales team through the website or via the provided contact information.
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