Dichlorosilane
Dichlorosilane (CAS: 4109-96-0, Formula: Cl2SiH2, Molar Mass: 101.01) is a colourless, highly reactive gas. It is a crucial precursor in the synthesis of silicon-containing compounds and finds significant application in the microelectronics industry for depositing silicon and silicon dioxide films. Its pyrophoric nature and reaction with water necessitate careful handling and specialised storage.
Semiconductor Manufacturing
Dichlorosilane is extensively used as a precursor gas in chemical vapour deposition (CVD) processes to create high-purity silicon films. It is also employed in the formation of silicon dioxide and silicon nitride layers critical for integrated circuits.
Chemical Synthesis
As a difunctional organosilicon compound, dichlorosilane serves as a versatile building block in organic and inorganic synthesis. It is used to introduce silyl groups and construct more complex silicon-based molecules.
Materials Science
It is utilized in the development of advanced materials, including advanced ceramics and composite materials, where the incorporation of silicon is desired for specific properties such as thermal stability and strength.
| Molecular weight | 101.01 |
|---|---|
| Linear formula | Cl2SiH2 |
| Assay | ≥99.99% trace metals basis |
| Boiling point | 8.3 °C(lit.) |
| Vapour pressure | 1254 mmHg (20 °C) |
| Vapour density | 3.5 (vs air) |
| Autoignition temp | 136 °F |
| Melting point | −122 °C(lit.) |
Hazard statements
- H220Extremely flammable gas
- H280Contains gas under pressure; may explode if heated
- H314Causes severe skin burns and eye damage
- H331Toxic if inhaled
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
- P410Protect from sunlight
| Protective equipment | Faceshields, Gloves, Goggles, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US) |
|---|---|
| Flash point | -37 °C / -34.6 °F |
| Transport (UN / ADR) | UN 2189 8(2.1;2.3) |
| Water hazard class (WGK, DE) | 1 |
| Hazard codes (EU) | F+,T |
| Risk statements (R) | 12-14-23-34 |
| Safety statements (S) | 26-36/37/39-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Expl Lim | 99 % |
|---|---|
| Film Resistivity | >50 Ω-cm |
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Dichlorosilane used for?
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Dichlorosilane (CAS: 4109-96-0) is primarily used in the microelectronics industry for depositing silicon films via chemical vapour deposition (CVD) and in chemical synthesis as a silylating agent.
What is the CAS number and chemical formula for Dichlorosilane?
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The CAS number is 4109-96-0, and its chemical formula is Cl2SiH2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Dichlorosilane with an assay of ≥99.99% (trace metals basis). We do not represent this product as USP, BP, EP, or other pharmacopoeia grades.
How should Dichlorosilane be handled safely?
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Dichlorosilane is an extremely flammable gas that reacts violently with water and is toxic if inhaled, causing severe skin burns and eye damage. It requires handling in a well-ventilated area, with appropriate personal protective equipment including a faceshield, gloves, goggles, and a suitable respirator. It must be protected from water and ignition sources.
How is Dichlorosilane shipped and exported by TSS?
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Dichlorosilane is supplied as a specialty gas and is carefully packaged and handled according to international regulations for hazardous materials, ensuring safe transport and export.
How can I request a quote or sample for Dichlorosilane?
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To request a quote or sample for Dichlorosilane, please contact our sales team through our website or by phone, providing your specific requirements.
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