3,3,4,4,5,5,6,6,7,7,8,8,9,10,10,10-Hexadecafluoro-9-(trifluoromethyl)decyl methacrylate
3,3,4,4,5,5,6,6,7,7,8,8,9,10,10,10-Hexadecafluoro-9-(trifluoromethyl)decyl methacrylate (CAS: 15166-00-4) is a highly fluorinated acrylic monomer with the linear formula H₂C=C(CH₃)CO₂CH₂CH₂(CF₂)₆CF(CF₃)₂. It possesses a molecular weight of 582.20 g/mol. This compound is primarily utilised in advanced materials science and microelectronics due to its unique fluorinated properties, serving as a key component in the synthesis of specialised polymers for lithography applications.
- Synonyms
- 4,5,5,6,6,7,7,8,8,9,10,10,10-Hexadecafluoro-9-(trifluoromethyl)decyl methacrylate15166-00-4H2C=C(CH3)CO2CH2CH2(CF2)6CF(CF3)2

Fluorinated Polymers for Lithography
This monomer is a crucial building block for creating advanced photoresist polymers. Its high fluorine content contributes to desirable properties for deep-UV lithography, particularly for 157 nm applications, enabling higher resolution and improved etching resistance in semiconductor manufacturing.
Surface Modification and Coatings
The incorporation of this highly fluorinated methacrylate into polymer chains can impart unique surface characteristics such as low surface energy, hydrophobicity, and oleophobicity. This makes it suitable for developing specialised coatings with enhanced chemical resistance and non-stick properties.
Materials for Micro/Nanoelectronics
Its specific chemical structure makes it valuable in the development of novel materials for micro and nanoelectronic devices. It can be employed in formulations for advanced patterning techniques and as a component in dielectric materials requiring low dielectric constants.
| Molecular weight | 582.20 |
|---|---|
| Linear formula | H2C=C(CH3)CO2CH2CH2(CF2)6CF(CF3)2 |
| Assay | 97% |
| Boiling point | 116 °C/6 mmHg(lit.) |
| Density | 1.629 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.345(lit.) |
| Contains / stabiliser | 0.01% 4-tert-butylcatechol as inhibitor |

Hazard statements
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
| Protective equipment | Eyeshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 113 °C / 235.4 °F |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xi |
| Risk statements (R) | 36/37/38 |
| Safety statements (S) | 26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is 3,3,4,4,5,5,6,6,7,7,8,8,9,10,10,10-Hexadecafluoro-9-(trifluoromethyl)decyl methacrylate used for?
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This compound is primarily used as a monomer in the synthesis of specialised polymers for advanced lithography applications, particularly in the microelectronics industry, and for developing materials with unique surface properties.
What are the CAS number and molecular formula for this product?
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The CAS number is 15166-00-4, and its linear formula is H₂C=C(CH₃)CO₂CH₂CH₂(CF₂)₆CF(CF₃)₂.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies this chemical with an assay of 97%. It is a research or technical grade material; TSS does not represent it as USP, BP, EP, or other pharmacopoeia grades.
What are the safety and handling precautions for this chemical?
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This compound is classified as a Warning with hazards H315 (Causes skin irritation), H319 (Causes serious eye irritation), and H335 (May cause respiratory irritation). Appropriate personal protective equipment, including eyeshields, gloves, and a suitable respirator, must be used. Handle in a well-ventilated area and avoid contact with skin, eyes, and clothing. Consult the Safety Data Sheet (SDS) for full details.
Is this product available for export?
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Yes, Tech Serve Solutions is a specialist global supplier and exporter of fine chemicals and reagents. This product can be shipped internationally, subject to relevant regulations.
How can I request a sample or a quote?
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To request a sample or obtain a quote for 3,3,4,4,5,5,6,6,7,7,8,8,9,10,10,10-Hexadecafluoro-9-(trifluoromethyl)decyl methacrylate, please contact our sales department through the website or by phone, providing your specific requirements and shipping details.
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