(2,2,3,3,4,4,5,5,6,6,7,7,7-Tridecafluoroheptyl)oxirane
(2,2,3,3,4,4,5,5,6,6,7,7,7-Tridecafluoroheptyl)oxirane (CAS 38565-52-5) is a specialized organofluorine compound with the molecular formula C9H5F13O and a molecular weight of 376.11 g/mol. Its unique fluorinated structure makes it a valuable monomer. It is primarily employed in the development of advanced materials for microelectronics, particularly in the formulation of lithography resist polymers for 157 nm UV applications. This compound is supplied by Tech Serve Solutions for research and material science purposes.
- Synonyms
- 3,4,4,5,5,6,6,7,7,7-Tridecafluoroheptyl)oxirane38565-52-5C9H5F13O

Lithography Resist Polymers
Serves as a critical fluorine-containing monomer for synthesizing polymers used in 157 nm UV lithography resists. These advanced resists are essential for creating intricate patterns in semiconductor manufacturing.
Micro/Nanoelectronics
Its properties are beneficial in the micro- and nanoelectronics industry for developing materials with specific performance characteristics. It contributes to advancements in high-resolution patterning technologies.
Materials Science
Used in materials science research for the development of novel fluorinated polymers. These materials can offer unique surface properties, chemical resistance, and thermal stability.
Self-Assembly & Contact Printing
The compound's fluorinated nature may lend itself to applications in self-assembly processes and contact printing techniques where controlled surface interactions are paramount.
| Molecular weight | 376.11 |
|---|---|
| Empirical formula | C9H5F13O |
| Assay | 97% |
| Boiling point | 80 °C/41 mmHg(lit.) |
| Density | 1.637 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.381(lit.) |
| Flash point | 91 °C / 195 °F |
|---|---|
| Water hazard class (WGK, DE) | 3 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is (2,2,3,3,4,4,5,5,6,6,7,7,7-Tridecafluoroheptyl)oxirane used for?
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(2,2,3,3,4,4,5,5,6,6,7,7,7-Tridecafluoroheptyl)oxirane is primarily used as a fluorine-containing monomer in the synthesis of polymers for 157 nm UV lithography resist applications, supporting advancements in microelectronics and materials science.
What are the CAS number and formula for this chemical?
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The CAS number is 38565-52-5, and the empirical formula is C9H5F13O.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies this chemical with an assay of 97%. It is not represented as USP, BP, EP, or any other pharmacopoeia grade.
What are the safety and handling considerations for this compound?
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This compound has a flash point of 91 °C (195 °F). Handle with appropriate personal protective equipment in a well-ventilated area, avoiding ignition sources. Consult the Safety Data Sheet for detailed hazard information.
How are this chemical packed, shipped, and exported?
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We offer various packaging options to suit different quantities and shipping requirements, adhering to all relevant regulations for national and international export. Please contact us for specific details.
How can I request a sample or a quote for this product?
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To request a sample or a quotation, please use the contact form on our website or call our sales department directly, referencing the product name and CAS number.
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